Formation of low resistance contacts to p-type 4H-SiC using al-film source laser doping

Kento Okamoto, Toshifumi Kikuchi, Akihiro Ikeda, Hiroshi Ikenoue, Tanemasa Asano

研究成果: 著書/レポートタイプへの貢献会議での発言

抄録

Impact of laser doping on the formation of ohmic contacts to 4H-SiC has been investigated. The laser doping was performed by irradiating pulse-width stretched KrF excimer laser to an Al film coated on the surface of 4H-SiC. Doping and contact formation on the carbon face of 4H-SiC were investigated. The doping was carried out while keeping the sample at room temperature. It is found that the laser doping is able to introduce Al up to a concentration as high as 5×1021 cm-3. As a result of heavy doping, the contact made of Ti/Al metallization provides the ohmic contact whose specific contact resistance as low as 4.0×10-6 Ωcm2 without additional heat treatment. The specific contact resistance is lower than that reported for ohmic contacts formed by using ion implantation.

元の言語英語
ホスト出版物のタイトルPHOTOPTICS 2019 - Proceedings of the 7th International Conference on Photonics, Optics and Laser Technology
編集者Paulo Ribeiro, Maria Raposo, David Andrews
出版者SciTePress
ページ294-298
ページ数5
ISBN(電子版)9789897583643
出版物ステータス出版済み - 1 1 2019
イベント7th International Conference on Photonics, Optics and Laser Technology, PHOTOPTICS 2019 - Prague, チェコ共和国
継続期間: 2 25 20192 27 2019

出版物シリーズ

名前PHOTOPTICS 2019 - Proceedings of the 7th International Conference on Photonics, Optics and Laser Technology

会議

会議7th International Conference on Photonics, Optics and Laser Technology, PHOTOPTICS 2019
チェコ共和国
Prague
期間2/25/192/27/19

Fingerprint

low resistance
lasers
electric contacts
contact resistance
excimer lasers
ion implantation
pulse duration
heat treatment
carbon
room temperature

All Science Journal Classification (ASJC) codes

  • Atomic and Molecular Physics, and Optics

これを引用

Okamoto, K., Kikuchi, T., Ikeda, A., Ikenoue, H., & Asano, T. (2019). Formation of low resistance contacts to p-type 4H-SiC using al-film source laser doping. : P. Ribeiro, M. Raposo, & D. Andrews (版), PHOTOPTICS 2019 - Proceedings of the 7th International Conference on Photonics, Optics and Laser Technology (pp. 294-298). (PHOTOPTICS 2019 - Proceedings of the 7th International Conference on Photonics, Optics and Laser Technology). SciTePress.

Formation of low resistance contacts to p-type 4H-SiC using al-film source laser doping. / Okamoto, Kento; Kikuchi, Toshifumi; Ikeda, Akihiro; Ikenoue, Hiroshi; Asano, Tanemasa.

PHOTOPTICS 2019 - Proceedings of the 7th International Conference on Photonics, Optics and Laser Technology. 版 / Paulo Ribeiro; Maria Raposo; David Andrews. SciTePress, 2019. p. 294-298 (PHOTOPTICS 2019 - Proceedings of the 7th International Conference on Photonics, Optics and Laser Technology).

研究成果: 著書/レポートタイプへの貢献会議での発言

Okamoto, K, Kikuchi, T, Ikeda, A, Ikenoue, H & Asano, T 2019, Formation of low resistance contacts to p-type 4H-SiC using al-film source laser doping. : P Ribeiro, M Raposo & D Andrews (版), PHOTOPTICS 2019 - Proceedings of the 7th International Conference on Photonics, Optics and Laser Technology. PHOTOPTICS 2019 - Proceedings of the 7th International Conference on Photonics, Optics and Laser Technology, SciTePress, pp. 294-298, 7th International Conference on Photonics, Optics and Laser Technology, PHOTOPTICS 2019, Prague, チェコ共和国, 2/25/19.
Okamoto K, Kikuchi T, Ikeda A, Ikenoue H, Asano T. Formation of low resistance contacts to p-type 4H-SiC using al-film source laser doping. : Ribeiro P, Raposo M, Andrews D, 編集者, PHOTOPTICS 2019 - Proceedings of the 7th International Conference on Photonics, Optics and Laser Technology. SciTePress. 2019. p. 294-298. (PHOTOPTICS 2019 - Proceedings of the 7th International Conference on Photonics, Optics and Laser Technology).
Okamoto, Kento ; Kikuchi, Toshifumi ; Ikeda, Akihiro ; Ikenoue, Hiroshi ; Asano, Tanemasa. / Formation of low resistance contacts to p-type 4H-SiC using al-film source laser doping. PHOTOPTICS 2019 - Proceedings of the 7th International Conference on Photonics, Optics and Laser Technology. 編集者 / Paulo Ribeiro ; Maria Raposo ; David Andrews. SciTePress, 2019. pp. 294-298 (PHOTOPTICS 2019 - Proceedings of the 7th International Conference on Photonics, Optics and Laser Technology).
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