Formation of microcones accompanied with ripple patterns in laser-activated plasma CVD of sp 3-bonded BN films

Shojiro Komatsu, Masaharu Shiratani

研究成果: Contribution to journalArticle査読

抄録

Scanning electron microscopic (SEM) observations revealed that individual and independent microcones of sp 3-bonded boron nitride grown by laser-activated plasma chemical vapor deposition were accompanied by ripple patterns spreading around them in the dimension of micrometers or sub-micrometers. The ripples were expanding equidistantly from each other and diminishing as they depart from a cone. The origin of the ripples was attributed to the interference of a direct laser cast on the plane surface and that reflected from the side of a cone; this model was satisfactorily in agreement with the SEM measurement, in which the side surface of a cone was mapped onto the plane surface surrounding the cone in the mathematical meaning of "bijection." This micro-optical effect due to the wave nature of laser was considered to indicate and support the photochemically activated growth reactions in this process.

本文言語英語
ページ(範囲)485-491
ページ数7
ジャーナルJournal of Materials Research
29
4
DOI
出版ステータス出版済み - 1 27 2014

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

フィンガープリント 「Formation of microcones accompanied with ripple patterns in laser-activated plasma CVD of sp <sup>3</sup>-bonded BN films」の研究トピックを掘り下げます。これらがまとまってユニークなフィンガープリントを構成します。

引用スタイル