TY - GEN
T1 - Formation of quasi-single-crystal Ge on plastic by nucleation-controlled Au-induced layer-exchange growth for flexible electronics
AU - Park, Jong Hyeok
AU - Miyao, Masanobu
AU - Sadoh, Taizoh
PY - 2014/1/1
Y1 - 2014/1/1
N2 - A low-temperature (≤250oC) formation technique of orientation-controlled large-grain Ge thin films on insulator is desirable for realization of advanced flexible electronics. To achieve this, the Au-induced crystallization technique combined with inter-diffusion-control and interface-energy-modulation techniques has been investigated. Consequently, selective formation of (111)-or (100)-oriented large-grain (>20 μm) Ge crystals on insulator have been realized. Moreover, formation of (111)-oriented large-grain Ge crystals directly on plastic substrates is demonstrated. This technique facilitates realization of future flexible electronics.
AB - A low-temperature (≤250oC) formation technique of orientation-controlled large-grain Ge thin films on insulator is desirable for realization of advanced flexible electronics. To achieve this, the Au-induced crystallization technique combined with inter-diffusion-control and interface-energy-modulation techniques has been investigated. Consequently, selective formation of (111)-or (100)-oriented large-grain (>20 μm) Ge crystals on insulator have been realized. Moreover, formation of (111)-oriented large-grain Ge crystals directly on plastic substrates is demonstrated. This technique facilitates realization of future flexible electronics.
UR - http://www.scopus.com/inward/record.url?scp=84906281541&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84906281541&partnerID=8YFLogxK
U2 - 10.1109/AM-FPD.2014.6867200
DO - 10.1109/AM-FPD.2014.6867200
M3 - Conference contribution
AN - SCOPUS:84906281541
SN - 9784863483958
T3 - Proceedings of AM-FPD 2014 - The 21st International Workshop on Active-Matrix Flatpanel Displays and Devices: TFT Technologies and FPD Materials
SP - 291
EP - 294
BT - Proceedings of AM-FPD 2014 - The 21st International Workshop on Active-Matrix Flatpanel Displays and Devices
PB - IEEE Computer Society
T2 - 21st International Workshop on Active-Matrix Flatpanel Displays and Devices: TFT Technologies and FPD Materials, AM-FPD 2014
Y2 - 2 July 2014 through 4 July 2014
ER -