Fundamental investigation for stochastic metrology with multi-sensors for micro-system technology: In case of optical path length

M. Michihata, P. D. Tran, Terutake Hayashi, Y. Takaya

研究成果: Chapter in Book/Report/Conference proceedingConference contribution

1 被引用数 (Scopus)

抄録

This study proposed the new approach to gain sensitivity of sensors. Usually, noise sources are considered to reduce for gaining sensitivity or dynamic range. In practical system, it is not the case that the noise can be reduced. In this study, therefore noises are positively utilized to enhance the sensitivity of sensors, which improves the sensor system by means of stochastic method. In this paper, a change of optical path length in interferometer was measured by using CCD camera as a multi-sensor in order to check the feasibility of this method.

本文言語英語
ホスト出版物のタイトル21st IMEKO TC2 Symposium on Photonics in Measurement
出版社IMEKO-International Measurement Federation Secretariat
出版ステータス出版済み - 2013
外部発表はい
イベント21st IMEKO TC2 Symposium on Photonics in Measurement - Gdansk, ポーランド
継続期間: 9 16 20139 18 2013

その他

その他21st IMEKO TC2 Symposium on Photonics in Measurement
国/地域ポーランド
CityGdansk
Period9/16/139/18/13

All Science Journal Classification (ASJC) codes

  • 原子分子物理学および光学

フィンガープリント

「Fundamental investigation for stochastic metrology with multi-sensors for micro-system technology: In case of optical path length」の研究トピックを掘り下げます。これらがまとまってユニークなフィンガープリントを構成します。

引用スタイル