Global analysis of effects of magnetic field configuration on melt-crystal interface shape and melt flow in CZ-Si crystal growth

Lijun Liu, Tomonori Kitashima, Koichi Kakimoto

研究成果: ジャーナルへの寄稿Conference article

17 引用 (Scopus)

抄録

In order to clarify the effects of configuration of magnetic field on the melt-crystal interface shape and the melt convection in a crucible, a set of numerical computations was conducted for a Czochralski furnace for silicon crystals of small diameter by global modeling. Under different combinations of crucible/crystal rotation rates, numerical comparisons were carried out for four configurations of magnetic field: a transverse magnetic field, a vertical magnetic field and two types of cusp-shaped magnetic fields. The computations revealed that each magnetic-field configuration has its own feature in affecting the melt convection and the melt-crystal interface shape when combining with variation in crystal/crucible rotation rates.

元の言語英語
ジャーナルJournal of Crystal Growth
275
発行部数1-2
DOI
出版物ステータス出版済み - 2 15 2005

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magnetic field configurations
Crystallization
Crystal growth
crystal growth
Magnetic fields
crucibles
Crystals
Crucibles
magnetic fields
crystals
convection
configurations
cusps
Silicon
furnaces
Furnaces
silicon

All Science Journal Classification (ASJC) codes

  • Condensed Matter Physics
  • Inorganic Chemistry
  • Materials Chemistry

これを引用

Global analysis of effects of magnetic field configuration on melt-crystal interface shape and melt flow in CZ-Si crystal growth. / Liu, Lijun; Kitashima, Tomonori; Kakimoto, Koichi.

:: Journal of Crystal Growth, 巻 275, 番号 1-2, 15.02.2005.

研究成果: ジャーナルへの寄稿Conference article

@article{21951731900045598de65fbb61c4db7f,
title = "Global analysis of effects of magnetic field configuration on melt-crystal interface shape and melt flow in CZ-Si crystal growth",
abstract = "In order to clarify the effects of configuration of magnetic field on the melt-crystal interface shape and the melt convection in a crucible, a set of numerical computations was conducted for a Czochralski furnace for silicon crystals of small diameter by global modeling. Under different combinations of crucible/crystal rotation rates, numerical comparisons were carried out for four configurations of magnetic field: a transverse magnetic field, a vertical magnetic field and two types of cusp-shaped magnetic fields. The computations revealed that each magnetic-field configuration has its own feature in affecting the melt convection and the melt-crystal interface shape when combining with variation in crystal/crucible rotation rates.",
author = "Lijun Liu and Tomonori Kitashima and Koichi Kakimoto",
year = "2005",
month = "2",
day = "15",
doi = "10.1016/j.jcrysgro.2004.11.292",
language = "English",
volume = "275",
journal = "Journal of Crystal Growth",
issn = "0022-0248",
publisher = "Elsevier",
number = "1-2",

}

TY - JOUR

T1 - Global analysis of effects of magnetic field configuration on melt-crystal interface shape and melt flow in CZ-Si crystal growth

AU - Liu, Lijun

AU - Kitashima, Tomonori

AU - Kakimoto, Koichi

PY - 2005/2/15

Y1 - 2005/2/15

N2 - In order to clarify the effects of configuration of magnetic field on the melt-crystal interface shape and the melt convection in a crucible, a set of numerical computations was conducted for a Czochralski furnace for silicon crystals of small diameter by global modeling. Under different combinations of crucible/crystal rotation rates, numerical comparisons were carried out for four configurations of magnetic field: a transverse magnetic field, a vertical magnetic field and two types of cusp-shaped magnetic fields. The computations revealed that each magnetic-field configuration has its own feature in affecting the melt convection and the melt-crystal interface shape when combining with variation in crystal/crucible rotation rates.

AB - In order to clarify the effects of configuration of magnetic field on the melt-crystal interface shape and the melt convection in a crucible, a set of numerical computations was conducted for a Czochralski furnace for silicon crystals of small diameter by global modeling. Under different combinations of crucible/crystal rotation rates, numerical comparisons were carried out for four configurations of magnetic field: a transverse magnetic field, a vertical magnetic field and two types of cusp-shaped magnetic fields. The computations revealed that each magnetic-field configuration has its own feature in affecting the melt convection and the melt-crystal interface shape when combining with variation in crystal/crucible rotation rates.

UR - http://www.scopus.com/inward/record.url?scp=15944370558&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=15944370558&partnerID=8YFLogxK

U2 - 10.1016/j.jcrysgro.2004.11.292

DO - 10.1016/j.jcrysgro.2004.11.292

M3 - Conference article

AN - SCOPUS:15944370558

VL - 275

JO - Journal of Crystal Growth

JF - Journal of Crystal Growth

SN - 0022-0248

IS - 1-2

ER -