TY - GEN
T1 - Growth of cubic AlN films on sapphire(0001) with atomic scale surface smoothness by pulsed laser deposition
AU - Yoshida, Tomohiro
AU - Yoshitake, Tsuyoshi
AU - Sumitani, Kazushi
AU - Ohtani, Ryota
AU - Nakagawa, You
AU - Mohri, Satoshi
AU - Nagayama, Kunihito
PY - 2010/2/9
Y1 - 2010/2/9
N2 - We have previously reported that β-AlN crystallites with diameters of 0.5-1 μm were occasionally grown on sapphire(0001) by pulsed laser deposition, which implied that the migration mobility of the species deposited on the substrate surface might be an insufficient for the film growth of β-AlN. In the present study, in order to enhance the crystal growth of β-AlN, sapphire(0001) substrates with an atomically smoothness (step-sapphire) were employed. The growth conditions of α- and β-AlN extended to higher nitrogen-pressures, as compared to those using normal surface sapphire(0001) substrates (normal-sapphire). This is due to the enhancement in the mobility of the deposited species on the substrate surface.
AB - We have previously reported that β-AlN crystallites with diameters of 0.5-1 μm were occasionally grown on sapphire(0001) by pulsed laser deposition, which implied that the migration mobility of the species deposited on the substrate surface might be an insufficient for the film growth of β-AlN. In the present study, in order to enhance the crystal growth of β-AlN, sapphire(0001) substrates with an atomically smoothness (step-sapphire) were employed. The growth conditions of α- and β-AlN extended to higher nitrogen-pressures, as compared to those using normal surface sapphire(0001) substrates (normal-sapphire). This is due to the enhancement in the mobility of the deposited species on the substrate surface.
UR - http://www.scopus.com/inward/record.url?scp=75849137941&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=75849137941&partnerID=8YFLogxK
U2 - 10.4028/www.scientific.net/MSF.638-642.2921
DO - 10.4028/www.scientific.net/MSF.638-642.2921
M3 - Conference contribution
AN - SCOPUS:75849137941
SN - 0878492941
SN - 9780878492947
T3 - Materials Science Forum
SP - 2921
EP - 2926
BT - THERMEC 2009
T2 - 6th International Conference on Processing and Manufacturing of Advanced Materials - THERMEC'2009
Y2 - 25 August 2009 through 29 August 2009
ER -