TY - JOUR
T1 - Growth of DLC thin films in hydrogen atmosphere by pulsed laser ablation of a PMMA target
AU - Yoshitake, T.
AU - Nishiyama, T.
AU - Nagayama, K.
N1 - Funding Information:
We would like to acknowledge Mr. Tsuya of Sumitomo Metals for providing Si substrates. The PLD films were prepared using a laser in the Institute for Ionized Gas and Laser Research, Kyushu Univ. The Raman spectrum measurement was made using equipment at the Center of Advanced Instrumental Analysis, Kyushu Univ. This work is supported by the Nippon Sheet Glass Foundation for Materials Science and Engineering.
Copyright:
Copyright 2004 Elsevier Science B.V., Amsterdam. All rights reserved.
PY - 2000
Y1 - 2000
N2 - Diamond-like carbon (DLC) films with thickness of 100 nm were deposited on glass and silicon substrates at temperatures of 20 °C by pulsed laser deposition (PLD) using a polymethyl methacrylate (PMMA) target. The abundant sp3 bonding was made possible because the species ejected from the PMMA target by laser ablation were dissociated into atomic species and atomic hydrogen, thus generating an sp2 etching effect. The sp2 bonding fraction increased due to the additional sp2 etching effect of the atomic hydrogen dissociated from the ambient hydrogen at pressure higher than 10 m Torr.
AB - Diamond-like carbon (DLC) films with thickness of 100 nm were deposited on glass and silicon substrates at temperatures of 20 °C by pulsed laser deposition (PLD) using a polymethyl methacrylate (PMMA) target. The abundant sp3 bonding was made possible because the species ejected from the PMMA target by laser ablation were dissociated into atomic species and atomic hydrogen, thus generating an sp2 etching effect. The sp2 bonding fraction increased due to the additional sp2 etching effect of the atomic hydrogen dissociated from the ambient hydrogen at pressure higher than 10 m Torr.
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U2 - 10.1023/A:1006745402283
DO - 10.1023/A:1006745402283
M3 - Article
AN - SCOPUS:0033873978
SN - 0261-8028
VL - 19
SP - 489
EP - 490
JO - Journal of Materials Science Letters
JF - Journal of Materials Science Letters
IS - 6
ER -