Growth of fluorocarbon macromolecules in a gas phase (I). Mass spectrometric investigation of products in the downstream region of Ar/CF 4 plasmas

Kenji Furuya, Shinobu Yukita, Hiroshi Okumura, Akira Harata

研究成果: Contribution to journalArticle査読

6 被引用数 (Scopus)

抄録

The growth of gaseous neutral species and positive ions was investigated in the downstream region of Ar/CF4 plasmas by mass spectrometry. As a result, there were several series of CnF2n+1+ (n = 1-7), CnF2n-1+ (n = 3-8) and C nF2n-3+ (n = 4-9) for the positive ions and CnF2n+2 (n = 2-7) and CnF2n (n = 4-8) for the neutral species. The intensity dependence of the positive ions on the partial pressure of CF4 was quite different from that of the neutral species, demonstrating that their growth mechanisms are independent of each other.

本文言語英語
ページ(範囲)224-225
ページ数2
ジャーナルChemistry Letters
34
2
DOI
出版ステータス出版済み - 2 5 2005

All Science Journal Classification (ASJC) codes

  • Chemistry(all)

フィンガープリント 「Growth of fluorocarbon macromolecules in a gas phase (I). Mass spectrometric investigation of products in the downstream region of Ar/CF <sub>4</sub> plasmas」の研究トピックを掘り下げます。これらがまとまってユニークなフィンガープリントを構成します。

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