Growth of fluorocarbon macromolecules in the gas phase: IV. Li +-attachment mass spectrometric investigation of high-mass neutral radicals in the downstream region of Ar/c-C4F8 plasmas

Hiroshi Okumura, Kenji Furuya, Akira Harata

研究成果: Contribution to journalArticle査読

3 被引用数 (Scopus)

抄録

Mass analysis has been conducted on neutral species in the downstream region of Ar/c-C4F8 plasmas by Li+-attachment mass spectrometry. Various peaks appeared in the mass spectrum observed in the case of 29% c-C4F8, and many of them have unambiguously been assigned to the Li+ adducts of neutral radicals with odd-numbered fluorine atoms from 2n + 1 to 2n - 5, where n means the number of carbon atoms, as well as neutral species with even-numbered fluorine atoms from 2n + 2 to 2n - 10. In contrast, only the peaks due to CnF 2n+2 (n = 1-7), CnF2n (n = 1, 4-8), C nF2n-2 (n = 3, 5-8) and C9F14 appeared in the case of 2.2% c-C4F8. These findings demonstrate that the Li+-attachment ionization is fragment-free, not only for relatively stable perfluorocarbon species but also for their neutral radicals, and therefore effective for the identification of high-mass neutral perfluorocarbon radicals. The analysis of the growth mechanisms of C nF2n+2 and CnF2n on the basis of thermochemistry has proposed CF3CF as an important reactant.

本文言語英語
論文番号065205
ジャーナルJournal of Physics D: Applied Physics
42
6
DOI
出版ステータス出版済み - 2009

All Science Journal Classification (ASJC) codes

  • 電子材料、光学材料、および磁性材料
  • 凝縮系物理学
  • 音響学および超音波学
  • 表面、皮膜および薄膜

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「Growth of fluorocarbon macromolecules in the gas phase: IV. Li <sup>+</sup>-attachment mass spectrometric investigation of high-mass neutral radicals in the downstream region of Ar/c-C<sub>4</sub>F<sub>8</sub> plasmas」の研究トピックを掘り下げます。これらがまとまってユニークなフィンガープリントを構成します。

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