We have investigated the influences of the heating rate and film thickness on the growth of GdBa2Cu3Oy, (GBCO) thin films prepared by the BaF2 ex-situ process without water vapor. Critical current density (Jc) and surface morphology of the GBCO films were improved by increasing the heating rate during growth from 30 to 50°C/min. The GBCO films prepared by the heating rate of 50°C/min had the maximum Jc of 2.1 MA/cm2. The Jc value of the GBCO films was about 2 MA/cm2 up to 200 nm, and decreased to 0.92 MA/cm2 at 400 nm.
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