抄録
Randomly and preferentially oriented thin films of yttria stabilized zirconia (YSZ) have been prepared on fused quartz substrates by ultrasonic spray pyrolysis using zirconium octylate and yttrium octylate as metallo-organic precursors at a substrate temperature of 873-1023 K. The as-deposited films composed of fine columnar grains were found to be crystalline and transparent with a cubic fluorite structure. With increasing substrate temperature the growth rate and diameter of the columnar grains increased and the crystal habit showed a preferential orientation at the (111) plane.
| 本文言語 | 英語 |
|---|---|
| ページ（範囲） | 72-76 |
| ページ数 | 5 |
| ジャーナル | Thin Solid Films |
| 巻 | 340 |
| 号 | 1 |
| DOI | |
| 出版ステータス | 出版済み - 2月 26 1999 |
| 外部発表 | はい |
!!!All Science Journal Classification (ASJC) codes
- 電子材料、光学材料、および磁性材料
- 表面および界面
- 表面、皮膜および薄膜
- 金属および合金
- 材料化学