High functionality of an optical fiber stylus for micro metrology

Hiroshi Murakami, Akio Katsuki, Takao Sajima, Kosuke Uchiyama, Takahiko Yamamoto, Ryosuke Nagata, Kunitaka Fujiyoshi

研究成果: 著書/レポートタイプへの貢献会議での発言

抄録

We aim to develop a highly accurate measurement system with a low measurement force using a micro optical fiber probe. In this research, we conducted performance test of water repellent and antistatic coating on a stylus tip to prevent adhesion to the measured surface by surface forces, in addition to durability tests. As a result, when a stylus tip with a water repellent coating was used, the separation distance from the target surface was shorter by approximately 78% compared with the uncoated tip. Also, when a stylus tip with an antistatic coating was used, the adsorption and separation distances were reduced by 84% and 77% compared with the uncoated tip.

元の言語英語
ホスト出版物のタイトルLaser Metrology and Machine Performance XIII - 13th International Conference and Exhibition on Laser Metrology, Machine Tool, CMM and Robotic Performance, LAMDAMAP 2019
編集者Liam Blunt, Wolfgang Knapp
出版者euspen
ページ73-77
ページ数5
ISBN(電子版)9780995775138
出版物ステータス出版済み - 1 1 2019
イベント13th International Conference and Exhibition on Laser Metrology, Machine Tool, CMM and Robotic Performance, LAMDAMAP 2019 - Sheffield, 英国
継続期間: 3 13 20193 14 2019

出版物シリーズ

名前Laser Metrology and Machine Performance XIII - 13th International Conference and Exhibition on Laser Metrology, Machine Tool, CMM and Robotic Performance, LAMDAMAP 2019

会議

会議13th International Conference and Exhibition on Laser Metrology, Machine Tool, CMM and Robotic Performance, LAMDAMAP 2019
英国
Sheffield
期間3/13/193/14/19

Fingerprint

metrology
Optical fibers
optical fibers
Coatings
coatings
Force measurement
Water
Durability
Adhesion
performance tests
Adsorption
durability
water
adhesion
adsorption
probes

All Science Journal Classification (ASJC) codes

  • Engineering(all)
  • Atomic and Molecular Physics, and Optics

これを引用

Murakami, H., Katsuki, A., Sajima, T., Uchiyama, K., Yamamoto, T., Nagata, R., & Fujiyoshi, K. (2019). High functionality of an optical fiber stylus for micro metrology. : L. Blunt, & W. Knapp (版), Laser Metrology and Machine Performance XIII - 13th International Conference and Exhibition on Laser Metrology, Machine Tool, CMM and Robotic Performance, LAMDAMAP 2019 (pp. 73-77). (Laser Metrology and Machine Performance XIII - 13th International Conference and Exhibition on Laser Metrology, Machine Tool, CMM and Robotic Performance, LAMDAMAP 2019). euspen.

High functionality of an optical fiber stylus for micro metrology. / Murakami, Hiroshi; Katsuki, Akio; Sajima, Takao; Uchiyama, Kosuke; Yamamoto, Takahiko; Nagata, Ryosuke; Fujiyoshi, Kunitaka.

Laser Metrology and Machine Performance XIII - 13th International Conference and Exhibition on Laser Metrology, Machine Tool, CMM and Robotic Performance, LAMDAMAP 2019. 版 / Liam Blunt; Wolfgang Knapp. euspen, 2019. p. 73-77 (Laser Metrology and Machine Performance XIII - 13th International Conference and Exhibition on Laser Metrology, Machine Tool, CMM and Robotic Performance, LAMDAMAP 2019).

研究成果: 著書/レポートタイプへの貢献会議での発言

Murakami, H, Katsuki, A, Sajima, T, Uchiyama, K, Yamamoto, T, Nagata, R & Fujiyoshi, K 2019, High functionality of an optical fiber stylus for micro metrology. : L Blunt & W Knapp (版), Laser Metrology and Machine Performance XIII - 13th International Conference and Exhibition on Laser Metrology, Machine Tool, CMM and Robotic Performance, LAMDAMAP 2019. Laser Metrology and Machine Performance XIII - 13th International Conference and Exhibition on Laser Metrology, Machine Tool, CMM and Robotic Performance, LAMDAMAP 2019, euspen, pp. 73-77, 13th International Conference and Exhibition on Laser Metrology, Machine Tool, CMM and Robotic Performance, LAMDAMAP 2019, Sheffield, 英国, 3/13/19.
Murakami H, Katsuki A, Sajima T, Uchiyama K, Yamamoto T, Nagata R その他. High functionality of an optical fiber stylus for micro metrology. : Blunt L, Knapp W, 編集者, Laser Metrology and Machine Performance XIII - 13th International Conference and Exhibition on Laser Metrology, Machine Tool, CMM and Robotic Performance, LAMDAMAP 2019. euspen. 2019. p. 73-77. (Laser Metrology and Machine Performance XIII - 13th International Conference and Exhibition on Laser Metrology, Machine Tool, CMM and Robotic Performance, LAMDAMAP 2019).
Murakami, Hiroshi ; Katsuki, Akio ; Sajima, Takao ; Uchiyama, Kosuke ; Yamamoto, Takahiko ; Nagata, Ryosuke ; Fujiyoshi, Kunitaka. / High functionality of an optical fiber stylus for micro metrology. Laser Metrology and Machine Performance XIII - 13th International Conference and Exhibition on Laser Metrology, Machine Tool, CMM and Robotic Performance, LAMDAMAP 2019. 編集者 / Liam Blunt ; Wolfgang Knapp. euspen, 2019. pp. 73-77 (Laser Metrology and Machine Performance XIII - 13th International Conference and Exhibition on Laser Metrology, Machine Tool, CMM and Robotic Performance, LAMDAMAP 2019).
@inproceedings{43fd578f54cd4c0eaa157d05f7e6af65,
title = "High functionality of an optical fiber stylus for micro metrology",
abstract = "We aim to develop a highly accurate measurement system with a low measurement force using a micro optical fiber probe. In this research, we conducted performance test of water repellent and antistatic coating on a stylus tip to prevent adhesion to the measured surface by surface forces, in addition to durability tests. As a result, when a stylus tip with a water repellent coating was used, the separation distance from the target surface was shorter by approximately 78{\%} compared with the uncoated tip. Also, when a stylus tip with an antistatic coating was used, the adsorption and separation distances were reduced by 84{\%} and 77{\%} compared with the uncoated tip.",
author = "Hiroshi Murakami and Akio Katsuki and Takao Sajima and Kosuke Uchiyama and Takahiko Yamamoto and Ryosuke Nagata and Kunitaka Fujiyoshi",
year = "2019",
month = "1",
day = "1",
language = "English",
series = "Laser Metrology and Machine Performance XIII - 13th International Conference and Exhibition on Laser Metrology, Machine Tool, CMM and Robotic Performance, LAMDAMAP 2019",
publisher = "euspen",
pages = "73--77",
editor = "Liam Blunt and Wolfgang Knapp",
booktitle = "Laser Metrology and Machine Performance XIII - 13th International Conference and Exhibition on Laser Metrology, Machine Tool, CMM and Robotic Performance, LAMDAMAP 2019",

}

TY - GEN

T1 - High functionality of an optical fiber stylus for micro metrology

AU - Murakami, Hiroshi

AU - Katsuki, Akio

AU - Sajima, Takao

AU - Uchiyama, Kosuke

AU - Yamamoto, Takahiko

AU - Nagata, Ryosuke

AU - Fujiyoshi, Kunitaka

PY - 2019/1/1

Y1 - 2019/1/1

N2 - We aim to develop a highly accurate measurement system with a low measurement force using a micro optical fiber probe. In this research, we conducted performance test of water repellent and antistatic coating on a stylus tip to prevent adhesion to the measured surface by surface forces, in addition to durability tests. As a result, when a stylus tip with a water repellent coating was used, the separation distance from the target surface was shorter by approximately 78% compared with the uncoated tip. Also, when a stylus tip with an antistatic coating was used, the adsorption and separation distances were reduced by 84% and 77% compared with the uncoated tip.

AB - We aim to develop a highly accurate measurement system with a low measurement force using a micro optical fiber probe. In this research, we conducted performance test of water repellent and antistatic coating on a stylus tip to prevent adhesion to the measured surface by surface forces, in addition to durability tests. As a result, when a stylus tip with a water repellent coating was used, the separation distance from the target surface was shorter by approximately 78% compared with the uncoated tip. Also, when a stylus tip with an antistatic coating was used, the adsorption and separation distances were reduced by 84% and 77% compared with the uncoated tip.

UR - http://www.scopus.com/inward/record.url?scp=85074189237&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85074189237&partnerID=8YFLogxK

M3 - Conference contribution

AN - SCOPUS:85074189237

T3 - Laser Metrology and Machine Performance XIII - 13th International Conference and Exhibition on Laser Metrology, Machine Tool, CMM and Robotic Performance, LAMDAMAP 2019

SP - 73

EP - 77

BT - Laser Metrology and Machine Performance XIII - 13th International Conference and Exhibition on Laser Metrology, Machine Tool, CMM and Robotic Performance, LAMDAMAP 2019

A2 - Blunt, Liam

A2 - Knapp, Wolfgang

PB - euspen

ER -