Secondary ion mass spectrometry (SIMS) is used to detect local distributions of hydrogen in various materials. However, it has been well-known that it is extremely difficult to analyze net hydrogen (HN) in metals with SIMS. This was because hydrogen, which is originated from moisture (H 2O), hydrocarbon (CxHy) or other organic materials (CxHyOz) existing on a sample surface or in the SIMS chamber, is simultaneously detected in the SIMS measurement of the HN, and the HN and the background-originated hydrogen (HBG) cannot be distinguished in a SIMS profile. The effective method for reductions and determinations of the HBG in hydrogen measurements of metallic materials with the SIMS method has not been established. The present paper shows an effective method for reduction and estimation of HBG in SIMS analyses of hydrogen charged into type 316 L austenitic stainless steel, and an accurate estimation method of the net charged hydrogen. In this research, a silicon wafer is sputtered by a primary ion beam of a SIMS near an analyzed area (silicon sputtering method) to reduce HBG. An uncharged type 316 L sample was prepared for estimation of HBG in SIMS measurements of the hydrogen-charged sample. The gross intensities of hydrogen between the hydrogen-charged sample and the uncharged sample were compared. The gross intensities of hydrogen of the uncharged sample (26.8-74.5cps) were much lower than the minimal gross intensities of hydrogen of the hydrogen-charged sample (462-1140 cps). Thus, we could reduce the H BG enough to estimate the hydrogen charged into the type 316 L sample. Moreover, we developed a method to determine intensities of H BG in the measurement of the hydrogen-charged sample by estimating the time-variation of hydrogen intensities in the measurements of the uncharged sample. The intensities of the charged hydrogen can be obtained by subtracting the estimated intensities of the HBG from the gross intensities of hydrogen of the hydrogen-charged sample. The silicon sputtering method used to reduce HBG and the determination method for HBG in this research can be applied to the accurate hydrogen analysis for other various metallic materials.
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