Highly sensitive terahertz-wave arrayed detector using InAs-HEMT on glass for video-imaging application

Hiromu Kojima, Daishi Kido, Haruichi Kanaya, Hiroyuki Ishii, Tatsuro Maeda, Eiji Kume, Mutsuo Ogura, Tanemasa Asano

研究成果: Chapter in Book/Report/Conference proceedingConference contribution

2 被引用数 (Scopus)

抄録

This paper presents a newly developed square law detector array whose NEP is as low as ∼ 1 pW/Hz0.5 for 1.0 THz waves. The detector array using high electron mobility transistor (HEMT) with InGaAs/InAs/InGaAs double hetero-structured channel has been fabricated. The InAs-HEMT was fabricated on a quartz substrate using the layer transfer technology. Also, an array of square law detectors was developed by applying advanced selective etching, atomic layer deposition, and metallization to the transferred hetero-structured layers. The static analysis revealed that the transistor shows electron mobility as high as 3,200 cm2/Vs and low leakage with subthreshold slope as low as ∼ 100 mV/dec. Detection performance was characterized by directly inputting 1.0 THz waves thorough a THz probe to each of the arrayed detectors. It is also demonstrated that the detection characteristics were well described by the analytical formulae derived from the channel-carrier behavior model. The experimental results suggested that the developed detector array is a promising candidate for imaging application.

本文言語英語
ホスト出版物のタイトルTerahertz, RF, Millimeter, and Submillimeter-Wave Technology and Applications XII
編集者Laurence P. Sadwick, Tianxin Yang
出版社SPIE
ISBN(電子版)9781510624764
DOI
出版ステータス出版済み - 2019
イベントTerahertz, RF, Millimeter, and Submillimeter-Wave Technology and Applications XII 2019 - San Francisco, 米国
継続期間: 2 4 20192 7 2019

出版物シリーズ

名前Proceedings of SPIE - The International Society for Optical Engineering
10917
ISSN(印刷版)0277-786X
ISSN(電子版)1996-756X

会議

会議Terahertz, RF, Millimeter, and Submillimeter-Wave Technology and Applications XII 2019
国/地域米国
CitySan Francisco
Period2/4/192/7/19

All Science Journal Classification (ASJC) codes

  • 電子材料、光学材料、および磁性材料
  • 凝縮系物理学
  • コンピュータ サイエンスの応用
  • 応用数学
  • 電子工学および電気工学

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