Highly sensitive terahertz-wave arrayed detector using InAs-HEMT on glass for video-imaging application

Hiromu Kojima, Daishi Kido, Haruichi Kanaya, Hiroyuki Ishii, Tatsuro Maeda, Eiji Kume, Mutsuo Ogura, Tanemasa Asano

研究成果: 著書/レポートタイプへの貢献会議での発言

抄録

This paper presents a newly developed square law detector array whose NEP is as low as ∼ 1 pW/Hz0.5 for 1.0 THz waves. The detector array using high electron mobility transistor (HEMT) with InGaAs/InAs/InGaAs double hetero-structured channel has been fabricated. The InAs-HEMT was fabricated on a quartz substrate using the layer transfer technology. Also, an array of square law detectors was developed by applying advanced selective etching, atomic layer deposition, and metallization to the transferred hetero-structured layers. The static analysis revealed that the transistor shows electron mobility as high as 3,200 cm2/Vs and low leakage with subthreshold slope as low as ∼ 100 mV/dec. Detection performance was characterized by directly inputting 1.0 THz waves thorough a THz probe to each of the arrayed detectors. It is also demonstrated that the detection characteristics were well described by the analytical formulae derived from the channel-carrier behavior model. The experimental results suggested that the developed detector array is a promising candidate for imaging application.

元の言語英語
ホスト出版物のタイトルTerahertz, RF, Millimeter, and Submillimeter-Wave Technology and Applications XII
編集者Laurence P. Sadwick, Tianxin Yang
出版者SPIE
ISBN(電子版)9781510624764
DOI
出版物ステータス出版済み - 1 1 2019
イベントTerahertz, RF, Millimeter, and Submillimeter-Wave Technology and Applications XII 2019 - San Francisco, 米国
継続期間: 2 4 20192 7 2019

出版物シリーズ

名前Proceedings of SPIE - The International Society for Optical Engineering
10917
ISSN(印刷物)0277-786X
ISSN(電子版)1996-756X

会議

会議Terahertz, RF, Millimeter, and Submillimeter-Wave Technology and Applications XII 2019
米国
San Francisco
期間2/4/192/7/19

Fingerprint

Terahertz waves
High electron mobility transistors
high electron mobility transistors
Imaging
Detector
Electron
Detectors
Imaging techniques
Glass
glass
detectors
InGaAs
technology transfer
Technology Transfer
Quartz
Atomic layer deposition
Electron mobility
Technology transfer
Static analysis
Static Analysis

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

これを引用

Kojima, H., Kido, D., Kanaya, H., Ishii, H., Maeda, T., Kume, E., ... Asano, T. (2019). Highly sensitive terahertz-wave arrayed detector using InAs-HEMT on glass for video-imaging application. : L. P. Sadwick, & T. Yang (版), Terahertz, RF, Millimeter, and Submillimeter-Wave Technology and Applications XII [109170Y] (Proceedings of SPIE - The International Society for Optical Engineering; 巻数 10917). SPIE. https://doi.org/10.1117/12.2510794

Highly sensitive terahertz-wave arrayed detector using InAs-HEMT on glass for video-imaging application. / Kojima, Hiromu; Kido, Daishi; Kanaya, Haruichi; Ishii, Hiroyuki; Maeda, Tatsuro; Kume, Eiji; Ogura, Mutsuo; Asano, Tanemasa.

Terahertz, RF, Millimeter, and Submillimeter-Wave Technology and Applications XII. 版 / Laurence P. Sadwick; Tianxin Yang. SPIE, 2019. 109170Y (Proceedings of SPIE - The International Society for Optical Engineering; 巻 10917).

研究成果: 著書/レポートタイプへの貢献会議での発言

Kojima, H, Kido, D, Kanaya, H, Ishii, H, Maeda, T, Kume, E, Ogura, M & Asano, T 2019, Highly sensitive terahertz-wave arrayed detector using InAs-HEMT on glass for video-imaging application. : LP Sadwick & T Yang (版), Terahertz, RF, Millimeter, and Submillimeter-Wave Technology and Applications XII., 109170Y, Proceedings of SPIE - The International Society for Optical Engineering, 巻. 10917, SPIE, Terahertz, RF, Millimeter, and Submillimeter-Wave Technology and Applications XII 2019, San Francisco, 米国, 2/4/19. https://doi.org/10.1117/12.2510794
Kojima H, Kido D, Kanaya H, Ishii H, Maeda T, Kume E その他. Highly sensitive terahertz-wave arrayed detector using InAs-HEMT on glass for video-imaging application. : Sadwick LP, Yang T, 編集者, Terahertz, RF, Millimeter, and Submillimeter-Wave Technology and Applications XII. SPIE. 2019. 109170Y. (Proceedings of SPIE - The International Society for Optical Engineering). https://doi.org/10.1117/12.2510794
Kojima, Hiromu ; Kido, Daishi ; Kanaya, Haruichi ; Ishii, Hiroyuki ; Maeda, Tatsuro ; Kume, Eiji ; Ogura, Mutsuo ; Asano, Tanemasa. / Highly sensitive terahertz-wave arrayed detector using InAs-HEMT on glass for video-imaging application. Terahertz, RF, Millimeter, and Submillimeter-Wave Technology and Applications XII. 編集者 / Laurence P. Sadwick ; Tianxin Yang. SPIE, 2019. (Proceedings of SPIE - The International Society for Optical Engineering).
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AU - Maeda, Tatsuro

AU - Kume, Eiji

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