HVEM/AFM observation of hinge-type plastic zones associated with cracks in silicon crystals

Masaki Tanaka, Kenji Higashida, Tatsuya Kishikawa, Tatsuya Morikawa

研究成果: Contribution to journalArticle査読

14 被引用数 (Scopus)

抄録

Dislocation structures developed in hinge-type plastic zones associated with cracks in silicon crystals have been studied using a high voltage electron microscope (HVEM). Fine slip bands due to those dislocations have been also examined by an atomic force microscope (AFM). {100} and {110} cracks were introduced into {110} silicon wafers at room temperature by Vickers indentation method. The temperature of the wafer chips indented was raised to higher than 823 K to activate dislocations around crack tips under a residual stress due to the indentation. In specimens with the heat-treatment, prominent dislocation arrays corresponding to the hinge-type plastic zone were observed not only near the crack tip but also in the crack wake. AFM observations showed that very fine slip bands with the step height of a few nano-meters were formed with the regular spacing of a few microns. Based on the analyses of those dislocations and slip bands, it has been revealed that those dislocations were shielding-type increasing the fracture toughness.

本文言語英語
ページ(範囲)2169-2172
ページ数4
ジャーナルMaterials Transactions
43
9
DOI
出版ステータス出版済み - 9 2002

All Science Journal Classification (ASJC) codes

  • 材料科学(全般)
  • 凝縮系物理学
  • 材料力学
  • 機械工学

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