Hydrogen sensors using Pd-based metallic glassy alloys

Susumu Kajita, Shin Ich Yamaura, Hisamichi Kimura, Kunio Yubuta, Akihisa Inoue

研究成果: ジャーナルへの寄稿学術誌査読

6 被引用数 (Scopus)

抄録

Pd-based metallic glassy alloys have been investigated as materials for the hydrogen sensors. We prepared thin films of Pd-Cu-Si alloy known as typical metallic glassy alloys by r. f. magnetron sputtering method. And then, we examined their sensitivity to hydrogen by measuring the change of electric resistance of thin films when they were exposed to hydrogen gases of various concentrations at 50°C and 100°C. As a result, Pd-Cu-Si metallic glassy alloys showed excellent property as materials for the hydrogen sensors.

本文言語英語
ページ(範囲)225-229
ページ数5
ジャーナルIEEJ Transactions on Sensors and Micromachines
128
5
DOI
出版ステータス出版済み - 2008
外部発表はい

!!!All Science Journal Classification (ASJC) codes

  • 機械工学
  • 電子工学および電気工学

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