In this paper, we have conducted identification experiments on the mass unbalance and high order sensor runout in a turbo molecular pump supported by active magnetic bearings (AMB), by using the proposed identification method. Firstly, output signals from the displacement sensors are converted and stored in the real time Linux. The mass unbalance and high-order sensor runout are identified using the weighted-incremental least square on-line method from the stored displacement data. Next, by attaching known plural weights on the rotor, the resulting unbalance and higher-order sensor runout were identified using the proposed method. Finally, the reproducibility of the identification experiment and the effectiveness and accuracy of the proposed identification method were verified by an already-known higher-order signal, which synchronizes with the rotor and corresponds to the sensor runout, is added to the rotor and estimate the added high order input signal.
|ジャーナル||Nippon Kikai Gakkai Ronbunshu, C Hen/Transactions of the Japan Society of Mechanical Engineers, Part C|
|出版ステータス||出版済み - 3 2004|
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