Impact of crystallization manner of the buffer layer on the crystalline quality of GaN epitaxial layers on GaAs (1 1 1)A substrate

Hisashi Murakami, Nobuhiko Kawaguchi, Yoshihiro Kangawa, Yoshinao Kumagai, Akinori Koukitu

研究成果: Contribution to journalConference article査読

6 被引用数 (Scopus)

抄録

We studied experimentally the crystallization of a low-temperature (LT)-GaN buffer layer and its effect on the subsequent crystalline quality of the GaN epitaxial layer. The degree of crystallization was sensitive to the thickness and the temperature ramp rate of the GaN buffer layer. When the LT-GaN buffer layer was more than 100 nm thick, there was relatively little crystallization of the buffer layer and subsequently poor crystalline quality of the GaN epitaxial layer. The optimum crystallization condition for the GaN buffer layer just prior to high-temperature growth was found when the single-crystal regions in the GaN buffer layer occupied a volume 40% as large as the randomly aligned matrix. We could reduce the threading dislocation density in the GaN epitaxial layer by inserting the LT-GaN buffer layers in periodically. To explain this result, we propose a mechanism by which the periodic layer reduces the density of threading dislocations.

本文言語英語
ページ(範囲)e1149-e1154
ジャーナルJournal of Crystal Growth
275
1-2
DOI
出版ステータス出版済み - 2 15 2005
外部発表はい

All Science Journal Classification (ASJC) codes

  • 凝縮系物理学
  • 無機化学
  • 材料化学

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