Impact of reflow on the output characteristics of piezoelectric microelectromechanical system devices

Hirofumi Nogami, Takeshi Kobayashi, Hironao Okada, Takashi Masuda, Ryutaro Maeda, Toshihiro Itoh

研究成果: Contribution to journalArticle査読

9 被引用数 (Scopus)


An animal health monitoring system and a wireless sensor node aimed at preventing the spread of animal-transmitted diseases and improving pastoral efficiency which are especially suitable for chickens, were developed. The sensor node uses a piezoelectric microelectromechanical system (MEMS) device and an event-driven system that is activated by the movements of a chicken. The piezoelectric MEMS device has two functions: a) it measures the activity of a chicken and b) switches the micro-control unit (MCU) of the wireless sensor node from the sleep mode. The piezoelectric MEMS device is required to produce high output voltages when the chicken moves. However, after the piezoelectric MEMS device was reflowed to the wireless sensor node, the output voltages of the piezoelectric MEMS device decreased. The main reason for this might be the loss of residual polarization, which is affected by the thermal load during the reflow process. After the reflow process, we were not able to apply a voltage to the piezoelectric MEMS device; thus, the piezoelectric output voltage was not increased by repoling the piezoelectric MEMS device. To address the thermal load of the reflow process, we established a thermal poling treatment, which achieves a higher temperature than the reflow process. We found that on increasing the thermal poling temperature, the piezoelectric output voltages did not decreased low significantly. Thus, we considered that a thermal poling temperature higher than that of the reflow process prevents the piezoelectric output voltage reduction caused by the thermal load.

ジャーナルJapanese journal of applied physics
9 PART 2
出版ステータス出版済み - 9 1 2012

All Science Journal Classification (ASJC) codes

  • 工学(全般)
  • 物理学および天文学(全般)


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