Impacts of amplitude modulation of RF discharge voltage on the growth of nanoparticles in reactive plasmas

研究成果: ジャーナルへの寄稿学術誌査読

11 被引用数 (Scopus)

抄録

We have investigated the effects of plasma fluctuation on the growth of nanoparticles in capacitively-coupled rf discharges with amplitude modulation (AM). Nanoparticles grow more slowly for higher AM levels, which causes the density of nanoparticles to increase by 100% and their size to decrease by 23%. The increase in the number of radicals for nucleation and nanoparticles by AM is thought to cause a decrease in the radical flux for a nanoparticle because the rate of increase in the number of radicals is smaller than that of nanoparticles. Therefore, this causes the generation of a large amount of nanoparticles with small sizes.

本文言語英語
論文番号105001
ジャーナルApplied Physics Express
4
10
DOI
出版ステータス出版済み - 10月 2011

!!!All Science Journal Classification (ASJC) codes

  • 工学(全般)
  • 物理学および天文学(全般)

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