Improvement of an optical fiber stylus for microstructure and surface roughness measurement

Kosuke Uchiyama, Hiroshi Murakami, Akio Katsuki, Takao Sajima, Takahiko Yamamoto, Kunitaka Fujiyoshi

研究成果: Chapter in Book/Report/Conference proceedingConference contribution

抄録

In recent years, there has been an increasing demand for measuring the inner diameter of a small diameter hole, such as a TSV, having a diameter of 10 μm or less. Therefore, we have been developing a measurement system using an optical fiber as a stylus to measure microstructures with low measurement force. In this study, a method to design and manufacture an improved two-step stylus that has a small shaft diameter, which can be inserted into a small diameter hole or small groove, and a large diameter of the remaining shaft less susceptible to external influences will be discussed. Furthermore, a method to design and manufacture a two-step plus hinge stylus with a hinge that further helps improve the measurement sensitivity of the two-step stylus, in addition an L-shaped stylus that has a pointed tip and bent shaft in the middle is proposed for surface roughness measurement.

本文言語英語
ホスト出版物のタイトルProceedings of the 20th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2020
編集者Richard K. Leach, David Billington, C. Nisbet, D. Phillips
出版社euspen
ページ313-316
ページ数4
ISBN(電子版)9780995775176
出版ステータス出版済み - 2020
イベント20th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2020 - Geneva, Virtual, オーストリア
継続期間: 6 8 20206 12 2020

出版物シリーズ

名前Proceedings of the 20th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2020

会議

会議20th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2020
Countryオーストリア
CityGeneva, Virtual
Period6/8/206/12/20

All Science Journal Classification (ASJC) codes

  • Instrumentation
  • Industrial and Manufacturing Engineering
  • Materials Science(all)
  • Environmental Engineering
  • Mechanical Engineering

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