Improvement of sensitivity of force sensor probe using quartz crystal resonator

Noriaki Hasegawa, Shinya Sakuma, Ayaka Sato, Fumihito Arai

研究成果: Chapter in Book/Report/Conference proceedingConference contribution

抄録

Measuring the mechanical properties of cells or tissues is important in the field of tissue engineering. However, previous force sensor probe using quartz crystal resonator (QCR) does not have enough sensitivity for measuring single cell and living membrane tissue. In this study, we present high sensitive force sensor probe using QCR. The key for improvement of resolution of QCR force sensor probe is the thickness of QCR. By using wet etching technique, we succeeded in decreasing the thickness of QCR from 41.7 to 15 μm. We evaluated the performance of fabricated QCR force sensor probe. The sensitivity and time stability were 712,888 Hz/N and 0.52 Hz, respectively. From these results, we achieved that the measurable minimum force was at 0.73 μN. Furthermore, the measurement range of the fabricated QCR force sensor probe was 0.73 μN through 50 mN.

本文言語英語
ホスト出版物のタイトル2016 International Symposium on Micro-NanoMechatronics and Human Science, MHS 2016
出版社Institute of Electrical and Electronics Engineers Inc.
ISBN(電子版)9781509027842
DOI
出版ステータス出版済み - 1 18 2017
外部発表はい
イベント27th International Symposium on Micro-NanoMechatronics and Human Science, MHS 2016 - Nagoya, 日本
継続期間: 11 28 201611 30 2016

出版物シリーズ

名前2016 International Symposium on Micro-NanoMechatronics and Human Science, MHS 2016

その他

その他27th International Symposium on Micro-NanoMechatronics and Human Science, MHS 2016
国/地域日本
CityNagoya
Period11/28/1611/30/16

All Science Journal Classification (ASJC) codes

  • 医学(その他)
  • 生体医工学
  • 機械工学
  • 人間とコンピュータの相互作用
  • 器械工学
  • コンピュータ サイエンスの応用
  • バイオテクノロジー
  • 人工知能

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