Improvement of sensitivity of force sensor probe using quartz crystal resonator

Noriaki Hasegawa; Shinya Sakuma; Ayaka Sato; Fumihito Arai

doi:10.1109/MHS.2016.7824175

Improvement of sensitivity of force sensor probe using quartz crystal resonator

Noriaki Hasegawa, Shinya Sakuma, Ayaka Sato, Fumihito Arai

研究成果: 書籍/レポートタイプへの寄稿 › 会議への寄与

抄録

Measuring the mechanical properties of cells or tissues is important in the field of tissue engineering. However, previous force sensor probe using quartz crystal resonator (QCR) does not have enough sensitivity for measuring single cell and living membrane tissue. In this study, we present high sensitive force sensor probe using QCR. The key for improvement of resolution of QCR force sensor probe is the thickness of QCR. By using wet etching technique, we succeeded in decreasing the thickness of QCR from 41.7 to 15 μm. We evaluated the performance of fabricated QCR force sensor probe. The sensitivity and time stability were 712,888 Hz/N and 0.52 Hz, respectively. From these results, we achieved that the measurable minimum force was at 0.73 μN. Furthermore, the measurement range of the fabricated QCR force sensor probe was 0.73 μN through 50 mN.

本文言語	英語
ホスト出版物のタイトル	2016 International Symposium on Micro-NanoMechatronics and Human Science, MHS 2016
出版社	Institute of Electrical and Electronics Engineers Inc.
ISBN（電子版）	9781509027842
DOI	https://doi.org/10.1109/MHS.2016.7824175
出版ステータス	出版済み - 1月 18 2017
外部発表	はい
イベント	27th International Symposium on Micro-NanoMechatronics and Human Science, MHS 2016 - Nagoya, 日本継続期間: 11月 28 2016 → 11月 30 2016

出版物シリーズ

名前	2016 International Symposium on Micro-NanoMechatronics and Human Science, MHS 2016

その他

その他	27th International Symposium on Micro-NanoMechatronics and Human Science, MHS 2016
国/地域	日本
City	Nagoya
Period	11/28/16 → 11/30/16

!!!All Science Journal Classification (ASJC) codes

医学（その他）
生体医工学
機械工学
人間とコンピュータの相互作用
器械工学
コンピュータサイエンスの応用
バイオテクノロジー
人工知能

UN SDG

この成果は、次の持続可能な開発目標に貢献しています

文献へのアクセス

10.1109/MHS.2016.7824175

他のファイルとリンク

引用スタイル

Hasegawa, N., Sakuma, S., Sato, A., & Arai, F. (2017). Improvement of sensitivity of force sensor probe using quartz crystal resonator. In 2016 International Symposium on Micro-NanoMechatronics and Human Science, MHS 2016 [7824175] (2016 International Symposium on Micro-NanoMechatronics and Human Science, MHS 2016). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MHS.2016.7824175

Improvement of sensitivity of force sensor probe using quartz crystal resonator. / Hasegawa, Noriaki; Sakuma, Shinya; Sato, Ayaka その他.
2016 International Symposium on Micro-NanoMechatronics and Human Science, MHS 2016. Institute of Electrical and Electronics Engineers Inc., 2017. 7824175 (2016 International Symposium on Micro-NanoMechatronics and Human Science, MHS 2016).

研究成果: 書籍/レポートタイプへの寄稿 › 会議への寄与

Hasegawa, N, Sakuma, S, Sato, A & Arai, F 2017, Improvement of sensitivity of force sensor probe using quartz crystal resonator. in 2016 International Symposium on Micro-NanoMechatronics and Human Science, MHS 2016., 7824175, 2016 International Symposium on Micro-NanoMechatronics and Human Science, MHS 2016, Institute of Electrical and Electronics Engineers Inc., 27th International Symposium on Micro-NanoMechatronics and Human Science, MHS 2016, Nagoya, 日本, 11/28/16. https://doi.org/10.1109/MHS.2016.7824175

Hasegawa N, Sakuma S, Sato A, Arai F. Improvement of sensitivity of force sensor probe using quartz crystal resonator. In 2016 International Symposium on Micro-NanoMechatronics and Human Science, MHS 2016. Institute of Electrical and Electronics Engineers Inc. 2017. 7824175. (2016 International Symposium on Micro-NanoMechatronics and Human Science, MHS 2016). doi: 10.1109/MHS.2016.7824175

Hasegawa, Noriaki ; Sakuma, Shinya ; Sato, Ayaka その他. / Improvement of sensitivity of force sensor probe using quartz crystal resonator. 2016 International Symposium on Micro-NanoMechatronics and Human Science, MHS 2016. Institute of Electrical and Electronics Engineers Inc., 2017. (2016 International Symposium on Micro-NanoMechatronics and Human Science, MHS 2016).

@inproceedings{11fdae868ed44c079f6e0ba1c71a88cd,

title = "Improvement of sensitivity of force sensor probe using quartz crystal resonator",

abstract = "Measuring the mechanical properties of cells or tissues is important in the field of tissue engineering. However, previous force sensor probe using quartz crystal resonator (QCR) does not have enough sensitivity for measuring single cell and living membrane tissue. In this study, we present high sensitive force sensor probe using QCR. The key for improvement of resolution of QCR force sensor probe is the thickness of QCR. By using wet etching technique, we succeeded in decreasing the thickness of QCR from 41.7 to 15 μm. We evaluated the performance of fabricated QCR force sensor probe. The sensitivity and time stability were 712,888 Hz/N and 0.52 Hz, respectively. From these results, we achieved that the measurable minimum force was at 0.73 μN. Furthermore, the measurement range of the fabricated QCR force sensor probe was 0.73 μN through 50 mN.",

author = "Noriaki Hasegawa and Shinya Sakuma and Ayaka Sato and Fumihito Arai",

note = "Publisher Copyright: {\textcopyright} 2016 IEEE. Copyright: Copyright 2017 Elsevier B.V., All rights reserved.; 27th International Symposium on Micro-NanoMechatronics and Human Science, MHS 2016 ; Conference date: 28-11-2016 Through 30-11-2016",

year = "2017",

month = jan,

day = "18",

doi = "10.1109/MHS.2016.7824175",

language = "English",

series = "2016 International Symposium on Micro-NanoMechatronics and Human Science, MHS 2016",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

booktitle = "2016 International Symposium on Micro-NanoMechatronics and Human Science, MHS 2016",

address = "United States",

}

TY - GEN

T1 - Improvement of sensitivity of force sensor probe using quartz crystal resonator

AU - Hasegawa, Noriaki

AU - Sakuma, Shinya

AU - Sato, Ayaka

AU - Arai, Fumihito

PY - 2017/1/18

Y1 - 2017/1/18

N2 - Measuring the mechanical properties of cells or tissues is important in the field of tissue engineering. However, previous force sensor probe using quartz crystal resonator (QCR) does not have enough sensitivity for measuring single cell and living membrane tissue. In this study, we present high sensitive force sensor probe using QCR. The key for improvement of resolution of QCR force sensor probe is the thickness of QCR. By using wet etching technique, we succeeded in decreasing the thickness of QCR from 41.7 to 15 μm. We evaluated the performance of fabricated QCR force sensor probe. The sensitivity and time stability were 712,888 Hz/N and 0.52 Hz, respectively. From these results, we achieved that the measurable minimum force was at 0.73 μN. Furthermore, the measurement range of the fabricated QCR force sensor probe was 0.73 μN through 50 mN.

AB - Measuring the mechanical properties of cells or tissues is important in the field of tissue engineering. However, previous force sensor probe using quartz crystal resonator (QCR) does not have enough sensitivity for measuring single cell and living membrane tissue. In this study, we present high sensitive force sensor probe using QCR. The key for improvement of resolution of QCR force sensor probe is the thickness of QCR. By using wet etching technique, we succeeded in decreasing the thickness of QCR from 41.7 to 15 μm. We evaluated the performance of fabricated QCR force sensor probe. The sensitivity and time stability were 712,888 Hz/N and 0.52 Hz, respectively. From these results, we achieved that the measurable minimum force was at 0.73 μN. Furthermore, the measurement range of the fabricated QCR force sensor probe was 0.73 μN through 50 mN.

UR - http://www.scopus.com/inward/record.url?scp=85013661424&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85013661424&partnerID=8YFLogxK

U2 - 10.1109/MHS.2016.7824175

DO - 10.1109/MHS.2016.7824175

M3 - Conference contribution

AN - SCOPUS:85013661424

T3 - 2016 International Symposium on Micro-NanoMechatronics and Human Science, MHS 2016

BT - 2016 International Symposium on Micro-NanoMechatronics and Human Science, MHS 2016

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 27th International Symposium on Micro-NanoMechatronics and Human Science, MHS 2016

Y2 - 28 November 2016 through 30 November 2016

ER -

Improvement of sensitivity of force sensor probe using quartz crystal resonator

抄録

出版物シリーズ

その他

!!!All Science Journal Classification (ASJC) codes

UN SDG

文献へのアクセス

他のファイルとリンク

フィンガープリント

引用スタイル