Improvement of superconductive properties of mesoscopic Nb wires by Ti passivation layers

Kohei Ohnishi, Takashi Kimura, Yoshichika Otani

研究成果: ジャーナルへの寄稿学術誌査読

9 被引用数 (Scopus)

抄録

We have investigated superconductive properties of nano-scale Nb wires fabricated by a simple lift-off process with magnetron sputtering. The superconductive properties of the Nb wires were remarkably improved by employing highly plasma resistant electron-beam resist ZEP520A combined with a thin Ti passivation layer. This optimized fabrication process yielded a 300-nm-wide Nb wire with the same transition temperature as that of the reference Nb film. Thereby, a highly transparent Nb/Cu junction was successfully fabricated.

本文言語英語
論文番号021701
ジャーナルApplied Physics Express
1
2
DOI
出版ステータス出版済み - 2月 2008
外部発表はい

!!!All Science Journal Classification (ASJC) codes

  • 工学(全般)
  • 物理学および天文学(全般)

フィンガープリント

「Improvement of superconductive properties of mesoscopic Nb wires by Ti passivation layers」の研究トピックを掘り下げます。これらがまとまってユニークなフィンガープリントを構成します。

引用スタイル