抄録
In this paper, we show that the adhesivity of the carbonic film to the substrate is very much improved by modifying the surface of the carbonic film with ion beam irradiation and the deformation of the gate electrode can be minimized. As a result, highly efficient electron-emission characteristic of the gated cold cathode with nano-pillars was demonstrated.
本文言語 | 英語 |
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ホスト出版物のタイトル | Digest of Papers - Microprocesses and Nanotechnology 2003 - 2003 International Microprocesses and Nanotechnology Conference, MNC 2003 |
出版社 | Institute of Electrical and Electronics Engineers Inc. |
ページ | 188-189 |
ページ数 | 2 |
ISBN(電子版) | 4891140402, 9784891140403 |
DOI | |
出版ステータス | 出版済み - 1月 1 2003 |
イベント | International Microprocesses and Nanotechnology Conference, MNC 2003 - Tokyo, 日本 継続期間: 10月 29 2003 → 10月 31 2003 |
その他
その他 | International Microprocesses and Nanotechnology Conference, MNC 2003 |
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国/地域 | 日本 |
City | Tokyo |
Period | 10/29/03 → 10/31/03 |
!!!All Science Journal Classification (ASJC) codes
- ハードウェアとアーキテクチャ
- 電子工学および電気工学