Influence of short pulse duration of carbon dioxide lasers on extreme ultraviolet emission from laser-produced plasmas

Reiho Amano, Thang Hung Dinh, Atsushi Sasanuma, Goki Arai, Hiroyuki Hara, Yusuke Fujii, Tadashi Hatano, Takeo Ejima, Weihua Jiang, Atsushi Sunahara, Akihiko Takahashi, Daisuke Nakamura, Tatsuo Okada, Kazuyuki Sakaue, Taisuke Miura, Gerry O'Sullivan, Takeshi Higashiguchi

研究成果: ジャーナルへの寄稿記事

2 引用 (Scopus)

抄録

We describe the production of mid-infrared (mid-IR) short carbon dioxide (CO 2 ) laser pulses with variable durations from 3 to 15ns at a maximum pulse energy of 150 mJ/pulse using a germanium (Ge) substrate semiconductor switch and a multipass amplifier. The results clearly show the spectral profiles possess all of the desired characteristics as well as the possibility of obtaining an energy conversion efficiency close to the theoretical upper limit. It is also shown that it is necessary to irradiate with pulse durations less than 10ns to optimize efficient EUV emission using Sn and Gd targets.

元の言語英語
記事番号070311
ジャーナルJapanese Journal of Applied Physics
57
発行部数7
DOI
出版物ステータス出版済み - 7 1 2018

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Carbon dioxide lasers
Semiconductor switches
Laser produced plasmas
carbon dioxide lasers
ultraviolet emission
Energy conversion
Germanium
laser plasmas
Conversion efficiency
Laser pulses
Carbon dioxide
pulse duration
Infrared radiation
Substrates
pulses
energy conversion efficiency
carbon dioxide
germanium
switches
amplifiers

All Science Journal Classification (ASJC) codes

  • Engineering(all)
  • Physics and Astronomy(all)

これを引用

Influence of short pulse duration of carbon dioxide lasers on extreme ultraviolet emission from laser-produced plasmas. / Amano, Reiho; Dinh, Thang Hung; Sasanuma, Atsushi; Arai, Goki; Hara, Hiroyuki; Fujii, Yusuke; Hatano, Tadashi; Ejima, Takeo; Jiang, Weihua; Sunahara, Atsushi; Takahashi, Akihiko; Nakamura, Daisuke; Okada, Tatsuo; Sakaue, Kazuyuki; Miura, Taisuke; O'Sullivan, Gerry; Higashiguchi, Takeshi.

:: Japanese Journal of Applied Physics, 巻 57, 番号 7, 070311, 01.07.2018.

研究成果: ジャーナルへの寄稿記事

Amano, R, Dinh, TH, Sasanuma, A, Arai, G, Hara, H, Fujii, Y, Hatano, T, Ejima, T, Jiang, W, Sunahara, A, Takahashi, A, Nakamura, D, Okada, T, Sakaue, K, Miura, T, O'Sullivan, G & Higashiguchi, T 2018, 'Influence of short pulse duration of carbon dioxide lasers on extreme ultraviolet emission from laser-produced plasmas', Japanese Journal of Applied Physics, 巻. 57, 番号 7, 070311. https://doi.org/10.7567/JJAP.57.070311
Amano, Reiho ; Dinh, Thang Hung ; Sasanuma, Atsushi ; Arai, Goki ; Hara, Hiroyuki ; Fujii, Yusuke ; Hatano, Tadashi ; Ejima, Takeo ; Jiang, Weihua ; Sunahara, Atsushi ; Takahashi, Akihiko ; Nakamura, Daisuke ; Okada, Tatsuo ; Sakaue, Kazuyuki ; Miura, Taisuke ; O'Sullivan, Gerry ; Higashiguchi, Takeshi. / Influence of short pulse duration of carbon dioxide lasers on extreme ultraviolet emission from laser-produced plasmas. :: Japanese Journal of Applied Physics. 2018 ; 巻 57, 番号 7.
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AU - Arai, Goki

AU - Hara, Hiroyuki

AU - Fujii, Yusuke

AU - Hatano, Tadashi

AU - Ejima, Takeo

AU - Jiang, Weihua

AU - Sunahara, Atsushi

AU - Takahashi, Akihiko

AU - Nakamura, Daisuke

AU - Okada, Tatsuo

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AU - Miura, Taisuke

AU - O'Sullivan, Gerry

AU - Higashiguchi, Takeshi

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