Influence of short pulse duration of carbon dioxide lasers on extreme ultraviolet emission from laser-produced plasmas

Reiho Amano, Thang Hung Dinh, Atsushi Sasanuma, Goki Arai, Hiroyuki Hara, Yusuke Fujii, Tadashi Hatano, Takeo Ejima, Weihua Jiang, Atsushi Sunahara, Akihiko Takahashi, Daisuke Nakamura, Tatsuo Okada, Kazuyuki Sakaue, Taisuke Miura, Gerry O'Sullivan, Takeshi Higashiguchi

研究成果: ジャーナルへの寄稿記事

3 引用 (Scopus)


We describe the production of mid-infrared (mid-IR) short carbon dioxide (CO2) laser pulses with variable durations from 3 to 15ns at a maximum pulse energy of 150 mJ/pulse using a germanium (Ge) substrate semiconductor switch and a multipass amplifier. The results clearly show the spectral profiles possess all of the desired characteristics as well as the possibility of obtaining an energy conversion efficiency close to the theoretical upper limit. It is also shown that it is necessary to irradiate with pulse durations less than 10ns to optimize efficient EUV emission using Sn and Gd targets.

ジャーナルJapanese Journal of Applied Physics
出版物ステータス出版済み - 7 2018


All Science Journal Classification (ASJC) codes

  • Engineering(all)
  • Physics and Astronomy(all)