Influence of short pulse duration of carbon dioxide lasers on extreme ultraviolet emission from laser-produced plasmas

Reiho Amano, Thang Hung Dinh, Atsushi Sasanuma, Goki Arai, Hiroyuki Hara, Yusuke Fujii, Tadashi Hatano, Takeo Ejima, Weihua Jiang, Atsushi Sunahara, Akihiko Takahashi, Daisuke Nakamura, Tatsuo Okada, Kazuyuki Sakaue, Taisuke Miura, Gerry O'Sullivan, Takeshi Higashiguchi

研究成果: Contribution to journalArticle査読

5 被引用数 (Scopus)

抄録

We describe the production of mid-infrared (mid-IR) short carbon dioxide (CO2) laser pulses with variable durations from 3 to 15ns at a maximum pulse energy of 150 mJ/pulse using a germanium (Ge) substrate semiconductor switch and a multipass amplifier. The results clearly show the spectral profiles possess all of the desired characteristics as well as the possibility of obtaining an energy conversion efficiency close to the theoretical upper limit. It is also shown that it is necessary to irradiate with pulse durations less than 10ns to optimize efficient EUV emission using Sn and Gd targets.

本文言語英語
論文番号070311
ジャーナルJapanese journal of applied physics
57
7
DOI
出版ステータス出版済み - 7 2018

All Science Journal Classification (ASJC) codes

  • 工学(全般)
  • 物理学および天文学(全般)

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