Influence of widths of discharge and gas density depletion on high repetition glow discharges in an ArF excimer laser for microlithography

Takanobu Ishihara, Tsukasa Hori, Kouji Kakizaki, Kiichiro Uchino

研究成果: ジャーナルへの寄稿学術誌査読

抄録

10 kHz repetition rate operation of an ArF excimer laser for microlithography is studied by focusing on the spatial separation between the discharge and the gas density depletion that is created by the previous discharge and that moves out of the discharge area due to the enforced laser gas circulation. The widths of discharge and the gas-density depletion were measured in detail by Mach-Zehnder interferometry. As a result, the minimum required distance between the center of the discharge and the center of the gas-density depletion area was found to be 1.4 times larger than the width of the discharge and is 12 % larger than the center-to-center distance at which the discharge area is just detached from the gas-density depletion area. This minimum required distance is 4.9 mm and 2 times as large as the distance estimated only from the absolute value of the gas density depletion.

本文言語英語
ページ(範囲)1060-1066+2
ジャーナルIEEJ Transactions on Fundamentals and Materials
130
12
DOI
出版ステータス出版済み - 2010

!!!All Science Journal Classification (ASJC) codes

  • 電子工学および電気工学

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