Infrared sensor with precisely patterned Au-black absorption layer

masaki Hirota, Shinichi Morita

研究成果: ジャーナルへの寄稿記事

18 引用 (Scopus)

抄録

Thermoelectric infrared sensors has been fabricated by adding to the CMOS process a surface micromachining technique and a highly accurate process for forming an infrared radiation absorbing layer. The sensor, or thermopile, consists of alternating areas of p-type and n-type polysilicon connected in series on a Si3N4 layer. An anisotropic etching technique using hydrazine is employed to form a thermally isolated membrane. While a Au-black layer for infrared radiation absorption provides the best absorption efficiency over a broad infrared wavelength region, it has been difficult to pattern the layer precisely. Patterning is accomplished by forming the Au-black layer by a low-pressure vapor deposition technique on amorphous Si and a PSG sacrificial layer and then removing it on PSG by the lift-off technique or wet etching PSG. This technique makes it possible to obtain a Au-black pattern with the same degree of accuracy as with the CMOS process. As a result, sensor performance has been improved and a device array has also been achieved. A simple sensor design method has been established by which simulations are easily conducted using a thermal equivalent circuit based on the CMOS process. Prototype sensors, having external dimensions of 160 μm×160 μm, achieved responsivity of 300, 149 and 60 V/W and a time constant of 2.0, 0.46 and 0.27 msec in the air, respectively. These performance figures surpass the performance reported to date for thermoelectric infrared sensors.

元の言語英語
ページ(範囲)623-634
ページ数12
ジャーナルProceedings of SPIE - The International Society for Optical Engineering
3436
発行部数2
出版物ステータス出版済み - 1998
外部発表Yes

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Infrared Sensor
Absorption
Infrared radiation
sensors
Sensors
Infrared Radiation
Sensor
CMOS
hydrazine
infrared radiation
Etching
etching
Thermopiles
radiation absorption
thermopiles
Surface micromachining
Anisotropic etching
Responsivity
Micromachining
Vapor deposition

All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering
  • Condensed Matter Physics

これを引用

Infrared sensor with precisely patterned Au-black absorption layer. / Hirota, masaki; Morita, Shinichi.

:: Proceedings of SPIE - The International Society for Optical Engineering, 巻 3436, 番号 2, 1998, p. 623-634.

研究成果: ジャーナルへの寄稿記事

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