Integrated blood flowmeter using micromachining technology

Yukie Omori, Renshi Sawada, Susumu Sakano

研究成果: 著書/レポートタイプへの貢献会議での発言

抄録

The micro machining technology has been advanced on the basis of the semiconductor manufacturing technology. In this study, the research on the manufacturing the integrated micro optical sensor accumulated LD and PD on the semiconductor substrate is practiced. The fabrication method is the technology of photolithography and etching technology in the semiconductor manufacturing. The blood flow meter is taken up as a typical application of the micro optical sensor.

元の言語英語
ホスト出版物のタイトル13th IMEKO TC4 Symposium on Measurements for Research and Industrial Applications 2004, Held Together with the 9th Workshop on ADC Modeling and Testing
出版者IMEKO-International Measurement Federation Secretariat
ページ447-452
ページ数6
ISBN(電子版)9781634391849
出版物ステータス出版済み - 1 1 2014
イベント13th IMEKO TC4 Symposium on Measurements for Research and Industrial Applications 2004, Held Together with the 9th Workshop on ADC Modeling and Testing - Athens, ギリシャ
継続期間: 9 29 200410 1 2004

出版物シリーズ

名前13th IMEKO TC4 Symposium on Measurements for Research and Industrial Applications 2004, Held Together with the 9th Workshop on ADC Modeling and Testing

その他

その他13th IMEKO TC4 Symposium on Measurements for Research and Industrial Applications 2004, Held Together with the 9th Workshop on ADC Modeling and Testing
ギリシャ
Athens
期間9/29/0410/1/04

Fingerprint

flowmeters
Flowmeters
Micromachining
micromachining
blood
Blood
manufacturing
optical measuring instruments
Optical sensors
Semiconductor materials
photolithography
blood flow
machining
Photolithography
etching
Etching
Machining
fabrication
Fabrication
Substrates

All Science Journal Classification (ASJC) codes

  • Civil and Structural Engineering
  • Industrial and Manufacturing Engineering
  • Instrumentation

これを引用

Omori, Y., Sawada, R., & Sakano, S. (2014). Integrated blood flowmeter using micromachining technology. : 13th IMEKO TC4 Symposium on Measurements for Research and Industrial Applications 2004, Held Together with the 9th Workshop on ADC Modeling and Testing (pp. 447-452). (13th IMEKO TC4 Symposium on Measurements for Research and Industrial Applications 2004, Held Together with the 9th Workshop on ADC Modeling and Testing). IMEKO-International Measurement Federation Secretariat.

Integrated blood flowmeter using micromachining technology. / Omori, Yukie; Sawada, Renshi; Sakano, Susumu.

13th IMEKO TC4 Symposium on Measurements for Research and Industrial Applications 2004, Held Together with the 9th Workshop on ADC Modeling and Testing. IMEKO-International Measurement Federation Secretariat, 2014. p. 447-452 (13th IMEKO TC4 Symposium on Measurements for Research and Industrial Applications 2004, Held Together with the 9th Workshop on ADC Modeling and Testing).

研究成果: 著書/レポートタイプへの貢献会議での発言

Omori, Y, Sawada, R & Sakano, S 2014, Integrated blood flowmeter using micromachining technology. : 13th IMEKO TC4 Symposium on Measurements for Research and Industrial Applications 2004, Held Together with the 9th Workshop on ADC Modeling and Testing. 13th IMEKO TC4 Symposium on Measurements for Research and Industrial Applications 2004, Held Together with the 9th Workshop on ADC Modeling and Testing, IMEKO-International Measurement Federation Secretariat, pp. 447-452, 13th IMEKO TC4 Symposium on Measurements for Research and Industrial Applications 2004, Held Together with the 9th Workshop on ADC Modeling and Testing, Athens, ギリシャ, 9/29/04.
Omori Y, Sawada R, Sakano S. Integrated blood flowmeter using micromachining technology. : 13th IMEKO TC4 Symposium on Measurements for Research and Industrial Applications 2004, Held Together with the 9th Workshop on ADC Modeling and Testing. IMEKO-International Measurement Federation Secretariat. 2014. p. 447-452. (13th IMEKO TC4 Symposium on Measurements for Research and Industrial Applications 2004, Held Together with the 9th Workshop on ADC Modeling and Testing).
Omori, Yukie ; Sawada, Renshi ; Sakano, Susumu. / Integrated blood flowmeter using micromachining technology. 13th IMEKO TC4 Symposium on Measurements for Research and Industrial Applications 2004, Held Together with the 9th Workshop on ADC Modeling and Testing. IMEKO-International Measurement Federation Secretariat, 2014. pp. 447-452 (13th IMEKO TC4 Symposium on Measurements for Research and Industrial Applications 2004, Held Together with the 9th Workshop on ADC Modeling and Testing).
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