Integrated blood flowmeter using micromachining technology

Yukie Omori, Renshi Sawada, Susumu Sakano

    研究成果: Chapter in Book/Report/Conference proceedingConference contribution

    抄録

    The micro machining technology has been advanced on the basis of the semiconductor manufacturing technology. In this study, the research on the manufacturing the integrated micro optical sensor accumulated LD and PD on the semiconductor substrate is practiced. The fabrication method is the technology of photolithography and etching technology in the semiconductor manufacturing. The blood flow meter is taken up as a typical application of the micro optical sensor.

    本文言語英語
    ホスト出版物のタイトル13th IMEKO TC4 Symposium on Measurements for Research and Industrial Applications 2004, Held Together with the 9th Workshop on ADC Modeling and Testing
    出版社IMEKO-International Measurement Federation Secretariat
    ページ447-452
    ページ数6
    ISBN(電子版)9781634391849
    出版ステータス出版済み - 1 1 2014
    イベント13th IMEKO TC4 Symposium on Measurements for Research and Industrial Applications 2004, Held Together with the 9th Workshop on ADC Modeling and Testing - Athens, ギリシャ
    継続期間: 9 29 200410 1 2004

    出版物シリーズ

    名前13th IMEKO TC4 Symposium on Measurements for Research and Industrial Applications 2004, Held Together with the 9th Workshop on ADC Modeling and Testing

    その他

    その他13th IMEKO TC4 Symposium on Measurements for Research and Industrial Applications 2004, Held Together with the 9th Workshop on ADC Modeling and Testing
    国/地域ギリシャ
    CityAthens
    Period9/29/0410/1/04

    All Science Journal Classification (ASJC) codes

    • 土木構造工学
    • 産業および生産工学
    • 器械工学

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