TY - JOUR
T1 - Integrated laser doppler blood flowmeter designed to enable wafer-level packaging
AU - Kimura, Yoshinori
AU - Goma, Masaki
AU - Onoe, Atsushi
AU - Higurashi, Eiji
AU - Sawada, Renshi
N1 - Funding Information:
Manuscript received July 9, 2009; revised December 14, 2009; accepted January 20, 2010. Date of publication March 1, 2010; date of current version July 14, 2010. This work was supported in part by the Core Research for Evolutional Science and Technology Program of the Japan Science and Technology Agency. Asterisk indicates corresponding author. *Y. Kimura is with Pioneer Corporation, Kawasaki, Japan, and also with the Graduate School of Systems Life Science, Kyushu University, Fukuoka, Japan (e-mail: yoshinori_kimura@post.pioneer.co.jp).
PY - 2010/8
Y1 - 2010/8
N2 - The authors propose a new sensor structure for an integrated laser Doppler blood flowmeter that consists of two silicon cavities with a PD and laser diode inside each cavity. A silicon lid formed with a converging microlens completes the package. This structure, which was achieved using micromachining techniques, features reduced optical power loss in the sensor, resulting in its small size and significantly low power consumption. Measurements using a model tissue blood flow system confirmed that the new sensor had high linearity and a wide dynamic range for measuring tissue blood flow.
AB - The authors propose a new sensor structure for an integrated laser Doppler blood flowmeter that consists of two silicon cavities with a PD and laser diode inside each cavity. A silicon lid formed with a converging microlens completes the package. This structure, which was achieved using micromachining techniques, features reduced optical power loss in the sensor, resulting in its small size and significantly low power consumption. Measurements using a model tissue blood flow system confirmed that the new sensor had high linearity and a wide dynamic range for measuring tissue blood flow.
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U2 - 10.1109/TBME.2010.2043842
DO - 10.1109/TBME.2010.2043842
M3 - Article
C2 - 20199932
AN - SCOPUS:77954637454
VL - 57
SP - 2026
EP - 2033
JO - IEEE Transactions on Biomedical Engineering
JF - IEEE Transactions on Biomedical Engineering
SN - 0018-9294
IS - 8
M1 - 5422744
ER -