Integrated laser doppler blood flowmeter designed to enable wafer-level packaging

Yoshinori Kimura, Masaki Goma, Atsushi Onoe, Eiji Higurashi, Renshi Sawada

    研究成果: Contribution to journalArticle査読

    23 被引用数 (Scopus)

    抄録

    The authors propose a new sensor structure for an integrated laser Doppler blood flowmeter that consists of two silicon cavities with a PD and laser diode inside each cavity. A silicon lid formed with a converging microlens completes the package. This structure, which was achieved using micromachining techniques, features reduced optical power loss in the sensor, resulting in its small size and significantly low power consumption. Measurements using a model tissue blood flow system confirmed that the new sensor had high linearity and a wide dynamic range for measuring tissue blood flow.

    本文言語英語
    論文番号5422744
    ページ(範囲)2026-2033
    ページ数8
    ジャーナルIEEE Transactions on Biomedical Engineering
    57
    8
    DOI
    出版ステータス出版済み - 8 2010

    All Science Journal Classification (ASJC) codes

    • 生体医工学

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