Integrated micro-laser displacement sensor

Renshi Sawada, E. Higurashi, T. Ito, M. Tsubamoto, O. Ohguchi

研究成果: Chapter in Book/Report/Conference proceedingConference contribution

5 被引用数 (Scopus)

抄録

A new integrated optical microlaser displacement sensor including a Michelson interferometer was developed and its feasibility as a measurement device was confirmed. It can measure the relative distance traveled against an outside reflective mirror. The measurement resolution is expected to be on the order of 0.01 μm. Its dimensions are 2.0 mm by 1.6 mm. Therefore, the displacement sensor itself can be moved at high speed and can be incorporated into a micromachine because its inertia is extremely small.

本文言語英語
ホスト出版物のタイトルProceedings of the IEEE Micro Electro Mechanical Systems (MEMS)
編集者 Anon
出版社IEEE
ページ19-24
ページ数6
出版ステータス出版済み - 1997
外部発表はい
イベントProceedings of the 1997 10th Annual International Workshop on Micro Electro Mechanical Systems, MEMS - Nagoya, Jpn
継続期間: 1 26 19971 30 1997

その他

その他Proceedings of the 1997 10th Annual International Workshop on Micro Electro Mechanical Systems, MEMS
CityNagoya, Jpn
Period1/26/971/30/97

All Science Journal Classification (ASJC) codes

  • 制御およびシステム工学
  • 電子工学および電気工学
  • 機械工学

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