Integrated micro laser doppler velocimeter with 3-D structure

Eiji Higurashi, Tadatomo Suga, Renshi Sawada

    研究成果: Chapter in Book/Report/Conference proceedingConference contribution

    2 被引用数 (Scopus)

    抄録

    Compact and thin micro laser Doppler velocimetry (LDV) sensor with 3-D structure (2.8 mm x 2.8 mm x 1 mm thick) was developed using Au-Au surface-activated bonding method (bonding temperature: 150 °C). It consists of two elements: a glass substrate with bonded photodiode chips, electrodes, and refractive microlenses; and a micromachined Si substrate with a submount, a bonded laser diode chip, micromirrors, and through-silicon vias. The feasibility of measuring velocity was demonstrated for various moving objects such as a reflective grating, an Au wire, and a light diffusing ground glass. The micro LDV sensor detected relative speeds as low as 0.4 μm/s and Doppler beat signal frequency showed good linearity to the relative velocity.

    本文言語英語
    ホスト出版物のタイトルIEEE Sensors 2010 Conference, SENSORS 2010
    ページ2409-2412
    ページ数4
    DOI
    出版ステータス出版済み - 12 1 2010
    イベント9th IEEE Sensors Conference 2010, SENSORS 2010 - Waikoloa, HI, 米国
    継続期間: 11 1 201011 4 2010

    出版物シリーズ

    名前Proceedings of IEEE Sensors

    その他

    その他9th IEEE Sensors Conference 2010, SENSORS 2010
    Country米国
    CityWaikoloa, HI
    Period11/1/1011/4/10

    All Science Journal Classification (ASJC) codes

    • Electrical and Electronic Engineering

    フィンガープリント 「Integrated micro laser doppler velocimeter with 3-D structure」の研究トピックを掘り下げます。これらがまとまってユニークなフィンガープリントを構成します。

    引用スタイル