Intensity-modulated excimer laser annealing to obtain (001) surface-oriented poly-si films on glass: Molecular dynamics study

Norie Matsubara, Tomohiko Ogata, Takanori Mitani, Shinji Munetoh, Teruaki Motooka

研究成果: 著書/レポートタイプへの貢献会議での発言

抄録

We have investigated the dependence of the melting and crystal growth rates on the crystal orientations at solid/liquid (s/l) silicon (Si) interfaces by molecular dynamics (MD) simulations. It was found that there was no appreciable difference in the melting rates in all crystal orientations, though the growth rate at Si(001)/l-Si was the largest in all crystal orientations. We have also performed MD simulations of intensity-modulated excimer laser annealing (IMELA) of Si thin films. These results suggest that (001) surface-oriented Si can be obtained by IMELA owing to the largest growth rate at Si(001)/l-Si of all in the repetitions of crystallization and melting.

元の言語英語
ホスト出版物のタイトルMaterials Research Society Symposium Proceedings - Artificially Induced Grain Alignment in Thin Films
ページ173-178
ページ数6
1150
出版物ステータス出版済み - 12 1 2009
イベント2008 MRS Fall Meeting - Boston, MA, 米国
継続期間: 12 2 200812 4 2008

その他

その他2008 MRS Fall Meeting
米国
Boston, MA
期間12/2/0812/4/08

Fingerprint

laser annealing
Excimer lasers
Silicon
Polysilicon
excimer lasers
Molecular dynamics
Annealing
molecular dynamics
Glass
glass
silicon
Crystal orientation
Melting
melting
Crystallization
crystals
Computer simulation
Crystal growth
crystal growth
repetition

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

これを引用

Matsubara, N., Ogata, T., Mitani, T., Munetoh, S., & Motooka, T. (2009). Intensity-modulated excimer laser annealing to obtain (001) surface-oriented poly-si films on glass: Molecular dynamics study. : Materials Research Society Symposium Proceedings - Artificially Induced Grain Alignment in Thin Films (巻 1150, pp. 173-178)

Intensity-modulated excimer laser annealing to obtain (001) surface-oriented poly-si films on glass : Molecular dynamics study. / Matsubara, Norie; Ogata, Tomohiko; Mitani, Takanori; Munetoh, Shinji; Motooka, Teruaki.

Materials Research Society Symposium Proceedings - Artificially Induced Grain Alignment in Thin Films. 巻 1150 2009. p. 173-178.

研究成果: 著書/レポートタイプへの貢献会議での発言

Matsubara, N, Ogata, T, Mitani, T, Munetoh, S & Motooka, T 2009, Intensity-modulated excimer laser annealing to obtain (001) surface-oriented poly-si films on glass: Molecular dynamics study. : Materials Research Society Symposium Proceedings - Artificially Induced Grain Alignment in Thin Films. 巻. 1150, pp. 173-178, 2008 MRS Fall Meeting, Boston, MA, 米国, 12/2/08.
Matsubara N, Ogata T, Mitani T, Munetoh S, Motooka T. Intensity-modulated excimer laser annealing to obtain (001) surface-oriented poly-si films on glass: Molecular dynamics study. : Materials Research Society Symposium Proceedings - Artificially Induced Grain Alignment in Thin Films. 巻 1150. 2009. p. 173-178
Matsubara, Norie ; Ogata, Tomohiko ; Mitani, Takanori ; Munetoh, Shinji ; Motooka, Teruaki. / Intensity-modulated excimer laser annealing to obtain (001) surface-oriented poly-si films on glass : Molecular dynamics study. Materials Research Society Symposium Proceedings - Artificially Induced Grain Alignment in Thin Films. 巻 1150 2009. pp. 173-178
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