Resonance measurements and atomic force microscopy (AFM) observations were carried out by the non-contact AFM operating in various gas atmospheres (hydrogen, helium, nitrogen and argon) over the range of pressures from 0.1 to 1.1MPa. In each atmosphere, the resonance frequency of the AFM cantilever depended on the pressure of gases studied. The plots of the relative resonance frequency at a constant pressure vs. the gas density gave a straight line. It was found that the characteristic of the resonance frequency for the AFM cantilever were dependent on the density of the gas species. The resolution of the AFM was hardly influenced by the gas atmosphere under the present experimental conditions.
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