Investigation of influence of gas atmosphere and pressure upon non-contact atomic force microscopy

Yasumasa Suzuki, Hirotoshi Enoki, Etsuo Akiba

研究成果: ジャーナルへの寄稿学術誌査読

5 被引用数 (Scopus)

抄録

Resonance measurements and atomic force microscopy (AFM) observations were carried out by the non-contact AFM operating in various gas atmospheres (hydrogen, helium, nitrogen and argon) over the range of pressures from 0.1 to 1.1MPa. In each atmosphere, the resonance frequency of the AFM cantilever depended on the pressure of gases studied. The plots of the relative resonance frequency at a constant pressure vs. the gas density gave a straight line. It was found that the characteristic of the resonance frequency for the AFM cantilever were dependent on the density of the gas species. The resolution of the AFM was hardly influenced by the gas atmosphere under the present experimental conditions.

本文言語英語
ページ(範囲)221-226
ページ数6
ジャーナルUltramicroscopy
99
4
DOI
出版ステータス出版済み - 6月 2004
外部発表はい

!!!All Science Journal Classification (ASJC) codes

  • 電子材料、光学材料、および磁性材料
  • 原子分子物理学および光学
  • 器械工学

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