TY - JOUR
T1 - Investigation of influence of gas atmosphere and pressure upon non-contact atomic force microscopy
AU - Suzuki, Yasumasa
AU - Enoki, Hirotoshi
AU - Akiba, Etsuo
N1 - Funding Information:
This study was supported by Industrial Technology Research Grant Program in 2000 from the New Energy and Industrial Technology Development Organization (NEDO) of Japan. The authors would like to thank Mr. Keiichi Nakamoto of JEOL Ltd. for useful suggestions during this study.
Copyright:
Copyright 2008 Elsevier B.V., All rights reserved.
PY - 2004/6
Y1 - 2004/6
N2 - Resonance measurements and atomic force microscopy (AFM) observations were carried out by the non-contact AFM operating in various gas atmospheres (hydrogen, helium, nitrogen and argon) over the range of pressures from 0.1 to 1.1MPa. In each atmosphere, the resonance frequency of the AFM cantilever depended on the pressure of gases studied. The plots of the relative resonance frequency at a constant pressure vs. the gas density gave a straight line. It was found that the characteristic of the resonance frequency for the AFM cantilever were dependent on the density of the gas species. The resolution of the AFM was hardly influenced by the gas atmosphere under the present experimental conditions.
AB - Resonance measurements and atomic force microscopy (AFM) observations were carried out by the non-contact AFM operating in various gas atmospheres (hydrogen, helium, nitrogen and argon) over the range of pressures from 0.1 to 1.1MPa. In each atmosphere, the resonance frequency of the AFM cantilever depended on the pressure of gases studied. The plots of the relative resonance frequency at a constant pressure vs. the gas density gave a straight line. It was found that the characteristic of the resonance frequency for the AFM cantilever were dependent on the density of the gas species. The resolution of the AFM was hardly influenced by the gas atmosphere under the present experimental conditions.
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U2 - 10.1016/j.ultramic.2003.12.008
DO - 10.1016/j.ultramic.2003.12.008
M3 - Article
C2 - 15149716
AN - SCOPUS:2442688155
VL - 99
SP - 221
EP - 226
JO - Ultramicroscopy
JF - Ultramicroscopy
SN - 0304-3991
IS - 4
ER -