Investigation of Surface Excitation Effect for Ablation of 4H-SiC Substrate Using Double-Pulse Beam

K. Matsunaga, T. Hayashi, S. Kurokawa, H. Yokoo, N. Hasegawa, M. Nishikino, T. Kumada, T. Otobe, Y. Matsukawa, Y. Takaya

研究成果: 著書/レポートタイプへの貢献会議での発言

抄録

The authors investigate a low-fluence laser processing system with a femtosecond double-pulse beam and surface excitation of a power semiconductor wafer. The double-pulse laser processing method enables a semiconductor surface to be processed at a lower fluence and prevents penetration damage of the processed surface. The first pulse of the double beam is considered to have a role in exciting the semiconductor surface to increase the efficiency of light energy absorption. In this report, to verify the feasibility of low-fluence processing, we measure the damage threshold in the low-fluence ablation process.

元の言語英語
ホスト出版物のタイトルX-Ray Lasers 2016 - Proceedings of the 15th International Conference on X-Ray Lasers
編集者Tetsuya Kawachi, Sergei V. Bulanov, Hiroyuki Daido, Yoshiaki Kato
出版者Springer Science and Business Media, LLC
ページ321-326
ページ数6
ISBN(印刷物)9783319730240
DOI
出版物ステータス出版済み - 1 1 2018
イベント15th International Conference on X-Ray Lasers, ICXRL 2016 - Nara, 日本
継続期間: 5 22 20165 27 2016

出版物シリーズ

名前Springer Proceedings in Physics
202
ISSN(印刷物)0930-8989
ISSN(電子版)1867-4941

その他

その他15th International Conference on X-Ray Lasers, ICXRL 2016
日本
Nara
期間5/22/165/27/16

Fingerprint

ablation
fluence
pulses
excitation
energy absorption
yield point
lasers
penetration
wafers
damage

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy(all)

これを引用

Matsunaga, K., Hayashi, T., Kurokawa, S., Yokoo, H., Hasegawa, N., Nishikino, M., ... Takaya, Y. (2018). Investigation of Surface Excitation Effect for Ablation of 4H-SiC Substrate Using Double-Pulse Beam. : T. Kawachi, S. V. Bulanov, H. Daido, & Y. Kato (版), X-Ray Lasers 2016 - Proceedings of the 15th International Conference on X-Ray Lasers (pp. 321-326). (Springer Proceedings in Physics; 巻数 202). Springer Science and Business Media, LLC. https://doi.org/10.1007/978-3-319-73025-7_48

Investigation of Surface Excitation Effect for Ablation of 4H-SiC Substrate Using Double-Pulse Beam. / Matsunaga, K.; Hayashi, T.; Kurokawa, S.; Yokoo, H.; Hasegawa, N.; Nishikino, M.; Kumada, T.; Otobe, T.; Matsukawa, Y.; Takaya, Y.

X-Ray Lasers 2016 - Proceedings of the 15th International Conference on X-Ray Lasers. 版 / Tetsuya Kawachi; Sergei V. Bulanov; Hiroyuki Daido; Yoshiaki Kato. Springer Science and Business Media, LLC, 2018. p. 321-326 (Springer Proceedings in Physics; 巻 202).

研究成果: 著書/レポートタイプへの貢献会議での発言

Matsunaga, K, Hayashi, T, Kurokawa, S, Yokoo, H, Hasegawa, N, Nishikino, M, Kumada, T, Otobe, T, Matsukawa, Y & Takaya, Y 2018, Investigation of Surface Excitation Effect for Ablation of 4H-SiC Substrate Using Double-Pulse Beam. : T Kawachi, SV Bulanov, H Daido & Y Kato (版), X-Ray Lasers 2016 - Proceedings of the 15th International Conference on X-Ray Lasers. Springer Proceedings in Physics, 巻. 202, Springer Science and Business Media, LLC, pp. 321-326, 15th International Conference on X-Ray Lasers, ICXRL 2016, Nara, 日本, 5/22/16. https://doi.org/10.1007/978-3-319-73025-7_48
Matsunaga K, Hayashi T, Kurokawa S, Yokoo H, Hasegawa N, Nishikino M その他. Investigation of Surface Excitation Effect for Ablation of 4H-SiC Substrate Using Double-Pulse Beam. : Kawachi T, Bulanov SV, Daido H, Kato Y, 編集者, X-Ray Lasers 2016 - Proceedings of the 15th International Conference on X-Ray Lasers. Springer Science and Business Media, LLC. 2018. p. 321-326. (Springer Proceedings in Physics). https://doi.org/10.1007/978-3-319-73025-7_48
Matsunaga, K. ; Hayashi, T. ; Kurokawa, S. ; Yokoo, H. ; Hasegawa, N. ; Nishikino, M. ; Kumada, T. ; Otobe, T. ; Matsukawa, Y. ; Takaya, Y. / Investigation of Surface Excitation Effect for Ablation of 4H-SiC Substrate Using Double-Pulse Beam. X-Ray Lasers 2016 - Proceedings of the 15th International Conference on X-Ray Lasers. 編集者 / Tetsuya Kawachi ; Sergei V. Bulanov ; Hiroyuki Daido ; Yoshiaki Kato. Springer Science and Business Media, LLC, 2018. pp. 321-326 (Springer Proceedings in Physics).
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