Investigation of the thermalization of sputtered atoms in a magnetron discharge using laser-induced fluorescence

W. Z. Park, T. Eguchi, C. Honda, K. Muraoka, Y. Yamagata, B. W. James, M. Maeda, M. Akazaki

研究成果: Contribution to journalArticle査読

18 被引用数 (Scopus)

抄録

The thermalization of sputtered atoms in a magnetron discharge was investigated using laser-induced fluorescence. The results clearly indicated for the first time that the velocity distribution agrees well with the Thompson formula [M. W. Thompson, Philos. Mag. 18, 377 (1968)] for d/λ≪1, while a thermalized component becomes appreciable for d/λ≳1, where d is the distance from the cathode surface and λ is the mean free path of sputtered atoms for collisions with filling gas atoms.

本文言語英語
ページ(範囲)2564-2566
ページ数3
ジャーナルApplied Physics Letters
58
22
DOI
出版ステータス出版済み - 1991

All Science Journal Classification (ASJC) codes

  • 物理学および天文学(その他)

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