Investigation on bistability and fabrication of bistable prestressed curved beam

Ivransa Zuhdi Pane, Tanemasa Asano

研究成果: Contribution to journalArticle査読

33 被引用数 (Scopus)

抄録

We investigated the bistability of bistable prestressed curved beam based on the theory of Euler buckling and the principle of the least energy. The bistability was found to be much affected by the ratio of the initial apex to the thickness of the curved beam. Using a standard silicon process, we fabricated curved beams made of single crystal Si. Voltage was then applied to the fabricated curved beams to generate capacitive electrostatic actuation force. The snap-through was confirmed in the range of 20 to 30 V apply voltage.

本文言語英語
ページ(範囲)5291-5296
ページ数6
ジャーナルJapanese journal of applied physics
47
6 PART 2
DOI
出版ステータス出版済み - 6 20 2008

All Science Journal Classification (ASJC) codes

  • 工学(全般)
  • 物理学および天文学(全般)

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