Investigations on the energy balance of the substrate during ZnO magnetron sputtering

S. Bornholdt, K. Kuwahara, Naho Itagaki, H. Wulff, Masaharu Shiratani, H. Kersten

研究成果: Chapter in Book/Report/Conference proceedingConference contribution

元の言語英語
ホスト出版物のタイトル39th EPS Conference on Plasma Physics 2012, EPS 2012 and the 16th International Congress on Plasma Physics
ページ1038-1041
ページ数4
出版物ステータス出版済み - 12 1 2012
イベント39th EPS Conference on Plasma Physics 2012, EPS 2012 and the 16th International Congress on Plasma Physics - Stockholm, スウェーデン
継続期間: 7 2 20127 6 2012

出版物シリーズ

名前39th EPS Conference on Plasma Physics 2012, EPS 2012 and the 16th International Congress on Plasma Physics
2

その他

その他39th EPS Conference on Plasma Physics 2012, EPS 2012 and the 16th International Congress on Plasma Physics
スウェーデン
Stockholm
期間7/2/127/6/12

All Science Journal Classification (ASJC) codes

  • Condensed Matter Physics

これを引用

Bornholdt, S., Kuwahara, K., Itagaki, N., Wulff, H., Shiratani, M., & Kersten, H. (2012). Investigations on the energy balance of the substrate during ZnO magnetron sputtering. : 39th EPS Conference on Plasma Physics 2012, EPS 2012 and the 16th International Congress on Plasma Physics (pp. 1038-1041). (39th EPS Conference on Plasma Physics 2012, EPS 2012 and the 16th International Congress on Plasma Physics; 巻数 2).