Ion implantation and diffusion behavior of silver in zinc oxide

Isao Sakaguchi; Ken Watanabe; Takeshi Ohgaki; Tsubasa Nakagawa; Shunichi Hishita; Yutaka Adachi; Naoki Ohashi; Hajime Haneda

doi:10.2109/jcersj2.118.217

Ion implantation and diffusion behavior of silver in zinc oxide

Isao Sakaguchi, Ken Watanabe, Takeshi Ohgaki, Tsubasa Nakagawa, Shunichi Hishita, Yutaka Adachi, Naoki Ohashi, Hajime Haneda

研究成果: ジャーナルへの寄稿 › 学術誌 › 査読

11 被引用数 (Scopus)

抄録

Silver implantation (75 keV, 2 × 10¹⁴ ions/cm²) in ZnO ceramics was carried out at room temperature to characterize the diffusion phenomenon. Annealing caused Ag evaporation from the sample. Results suggest that it is difficult to incorporate Ag into Zn site by annealing. The Ag profile with the monotonous decrease in concentration below 3 × 10 ¹⁷/cm³ was observed in ZnO annealed at 900°C. Above results become the basic results for producing the ZnO sensor used the reaction at surface and the grain boundary.

本文言語	英語
ページ（範囲）	217-219
ページ数	3
ジャーナル	Journal of the Ceramic Society of Japan
巻	118
号	1375
DOI	https://doi.org/10.2109/jcersj2.118.217
出版ステータス	出版済み - 3月 2010
外部発表	はい

!!!All Science Journal Classification (ASJC) codes

セラミックおよび複合材料
化学 (全般)
凝縮系物理学
材料化学

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title = "Ion implantation and diffusion behavior of silver in zinc oxide",

abstract = "Silver implantation (75 keV, 2 × 1014 ions/cm2) in ZnO ceramics was carried out at room temperature to characterize the diffusion phenomenon. Annealing caused Ag evaporation from the sample. Results suggest that it is difficult to incorporate Ag into Zn site by annealing. The Ag profile with the monotonous decrease in concentration below 3 × 10 17/cm3 was observed in ZnO annealed at 900°C. Above results become the basic results for producing the ZnO sensor used the reaction at surface and the grain boundary.",

author = "Isao Sakaguchi and Ken Watanabe and Takeshi Ohgaki and Tsubasa Nakagawa and Shunichi Hishita and Yutaka Adachi and Naoki Ohashi and Hajime Haneda",

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doi = "10.2109/jcersj2.118.217",

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T1 - Ion implantation and diffusion behavior of silver in zinc oxide

AU - Sakaguchi, Isao

AU - Watanabe, Ken

AU - Ohgaki, Takeshi

AU - Nakagawa, Tsubasa

AU - Hishita, Shunichi

AU - Adachi, Yutaka

AU - Ohashi, Naoki

AU - Haneda, Hajime

PY - 2010/3

Y1 - 2010/3

N2 - Silver implantation (75 keV, 2 × 1014 ions/cm2) in ZnO ceramics was carried out at room temperature to characterize the diffusion phenomenon. Annealing caused Ag evaporation from the sample. Results suggest that it is difficult to incorporate Ag into Zn site by annealing. The Ag profile with the monotonous decrease in concentration below 3 × 10 17/cm3 was observed in ZnO annealed at 900°C. Above results become the basic results for producing the ZnO sensor used the reaction at surface and the grain boundary.

AB - Silver implantation (75 keV, 2 × 1014 ions/cm2) in ZnO ceramics was carried out at room temperature to characterize the diffusion phenomenon. Annealing caused Ag evaporation from the sample. Results suggest that it is difficult to incorporate Ag into Zn site by annealing. The Ag profile with the monotonous decrease in concentration below 3 × 10 17/cm3 was observed in ZnO annealed at 900°C. Above results become the basic results for producing the ZnO sensor used the reaction at surface and the grain boundary.

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JO - Nippon Seramikkusu Kyokai Gakujutsu Ronbunshi/Journal of the Ceramic Society of Japan

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Ion implantation and diffusion behavior of silver in zinc oxide

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!!!All Science Journal Classification (ASJC) codes

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