Large-area optical coatings with uniform thickness grown by surface chemical reactions for high-power laser applications

Shin Ichi Zaitsu, Shinji Motokoshi, Takahisa Jitsuno, Masahiro Nakatsuka, Tatsuhiko Yamanaka

研究成果: ジャーナルへの寄稿学術誌査読

39 被引用数 (Scopus)

抄録

We prepared optical thin films using an atomic layer deposition (ALD) procedure in order to apply this coating method to optical components for high-power and large-scale lasers. Film thickness shows a proportional relationship to the number of operation cycles even in the case of room-temperature growth, and the distribution is uniform with a thickness error of less than 1% over an area of 240 mm diameter. We examined the laser damage thresholds of the films with 1 ns laser pulses at 1.064 μm. The highest thresholds (TiO2: 5 J/cm2, Al2O3:5.2 J/cm2) are obtained in the amorphous films grown at low growth temperatures (25-50°C). Results from the analysis of film structure and composition, and measurement of optical absorption reveal that the decrease in laser damage threshold as the growth temperature rises is caused by the crystallization of films.

本文言語英語
ページ(範囲)160-165
ページ数6
ジャーナルJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
41
1
DOI
出版ステータス出版済み - 1月 1 2002
外部発表はい

!!!All Science Journal Classification (ASJC) codes

  • 工学(全般)
  • 物理学および天文学(全般)

フィンガープリント

「Large-area optical coatings with uniform thickness grown by surface chemical reactions for high-power laser applications」の研究トピックを掘り下げます。これらがまとまってユニークなフィンガープリントを構成します。

引用スタイル