Laser-imaging of laser-produced tin plume behavior for EUV light source

Daisuke Nakamura, Yuki Hashimoto, Koji Tamaru, Akihiko Takahashi, Tatsuo Okada

研究成果: Chapter in Book/Report/Conference proceedingConference contribution

抄録

Debris, generated form a laser-produced Sn plasma extreme-ultraviolet source for the next generation optical lithography, was investigated by the laser-induced fluorescence (LIF) imaging for Sn atoms and a Faraday cup for ionic species. The sputtering by the fast ions from the plasma was also investigated by the LIF method.

本文言語英語
ホスト出版物のタイトル2007 Conference on Lasers and Electro-Optics - Pacific Rim, CLEO/PACIFIC RIM
DOI
出版ステータス出版済み - 12 1 2007
イベント2007 Conference on Lasers and Electro-Optics - Pacific Rim, CLEO/PACIFIC RIM - Seoul, 大韓民国
継続期間: 8 26 20078 31 2007

出版物シリーズ

名前Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest

その他

その他2007 Conference on Lasers and Electro-Optics - Pacific Rim, CLEO/PACIFIC RIM
Country大韓民国
CitySeoul
Period8/26/078/31/07

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Electrical and Electronic Engineering

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