Laser-imaging of laser-produced tin plume behavior for EUV light source

Daisuke Nakamura, Yuki Hashimoto, Koji Tamaru, Akihiko Takahashi, Tatsuo Okada

研究成果: 著書/レポートタイプへの貢献会議での発言

抄録

Debris, generated form a laser-produced Sn plasma extreme-ultraviolet source for the next generation optical lithography, was investigated by the laser-induced fluorescence (LIF) imaging for Sn atoms and a Faraday cup for ionic species. The sputtering by the fast ions from the plasma was also investigated by the LIF method.

元の言語英語
ホスト出版物のタイトル2007 Conference on Lasers and Electro-Optics - Pacific Rim, CLEO/PACIFIC RIM
DOI
出版物ステータス出版済み - 12 1 2007
イベント2007 Conference on Lasers and Electro-Optics - Pacific Rim, CLEO/PACIFIC RIM - Seoul, 大韓民国
継続期間: 8 26 20078 31 2007

出版物シリーズ

名前Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest

その他

その他2007 Conference on Lasers and Electro-Optics - Pacific Rim, CLEO/PACIFIC RIM
大韓民国
Seoul
期間8/26/078/31/07

Fingerprint

Tin
laser induced fluorescence
plumes
Light sources
tin
light sources
Fluorescence
Laser produced plasmas
Imaging techniques
Lasers
Photolithography
debris
Debris
lasers
Sputtering
lithography
sputtering
Ions
Plasmas
Atoms

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Electrical and Electronic Engineering

これを引用

Nakamura, D., Hashimoto, Y., Tamaru, K., Takahashi, A., & Okada, T. (2007). Laser-imaging of laser-produced tin plume behavior for EUV light source. : 2007 Conference on Lasers and Electro-Optics - Pacific Rim, CLEO/PACIFIC RIM [4391455] (Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest). https://doi.org/10.1109/CLEOPR.2007.4391455

Laser-imaging of laser-produced tin plume behavior for EUV light source. / Nakamura, Daisuke; Hashimoto, Yuki; Tamaru, Koji; Takahashi, Akihiko; Okada, Tatsuo.

2007 Conference on Lasers and Electro-Optics - Pacific Rim, CLEO/PACIFIC RIM. 2007. 4391455 (Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest).

研究成果: 著書/レポートタイプへの貢献会議での発言

Nakamura, D, Hashimoto, Y, Tamaru, K, Takahashi, A & Okada, T 2007, Laser-imaging of laser-produced tin plume behavior for EUV light source. : 2007 Conference on Lasers and Electro-Optics - Pacific Rim, CLEO/PACIFIC RIM., 4391455, Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest, 2007 Conference on Lasers and Electro-Optics - Pacific Rim, CLEO/PACIFIC RIM, Seoul, 大韓民国, 8/26/07. https://doi.org/10.1109/CLEOPR.2007.4391455
Nakamura D, Hashimoto Y, Tamaru K, Takahashi A, Okada T. Laser-imaging of laser-produced tin plume behavior for EUV light source. : 2007 Conference on Lasers and Electro-Optics - Pacific Rim, CLEO/PACIFIC RIM. 2007. 4391455. (Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest). https://doi.org/10.1109/CLEOPR.2007.4391455
Nakamura, Daisuke ; Hashimoto, Yuki ; Tamaru, Koji ; Takahashi, Akihiko ; Okada, Tatsuo. / Laser-imaging of laser-produced tin plume behavior for EUV light source. 2007 Conference on Lasers and Electro-Optics - Pacific Rim, CLEO/PACIFIC RIM. 2007. (Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest).
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