Laser-imaging of laser-produced tin plume behavior for EUV light source

Daisuke Nakamura, Yuki Hashimoto, Koji Tamaru, Akihiko Takahashi, Tatsuo Okada

研究成果: 著書/レポートタイプへの貢献会議での発言

抄録

Debris, generated form a laser-produced Sn plasma extreme-ultraviolet source for the next generation optical lithography, was investigated by the laser-induced fluorescence (LIF) imaging for Sn atoms and a Faraday cup for ionic species. The sputtering by the fast ions from the plasma was also investigated by the LIF method.

元の言語英語
ホスト出版物のタイトルConference on Lasers and Electro-Optics/Pacific Rim, CLEOPR 2007
出版者Optical Society of America
ISBN(印刷物)1424411742, 9781424411740
出版物ステータス出版済み - 1 1 2007
イベントConference on Lasers and Electro-Optics/Pacific Rim, CLEOPR 2007 - Seoul, 大韓民国
継続期間: 8 26 20078 26 2007

出版物シリーズ

名前Optics InfoBase Conference Papers
ISSN(電子版)2162-2701

その他

その他Conference on Lasers and Electro-Optics/Pacific Rim, CLEOPR 2007
大韓民国
Seoul
期間8/26/078/26/07

Fingerprint

laser induced fluorescence
Tin
plumes
Light sources
tin
light sources
Fluorescence
Laser produced plasmas
Imaging techniques
Lasers
Photolithography
debris
Debris
lasers
Sputtering
lithography
sputtering
Plasmas
Atoms
Ions

All Science Journal Classification (ASJC) codes

  • Instrumentation
  • Atomic and Molecular Physics, and Optics

これを引用

Nakamura, D., Hashimoto, Y., Tamaru, K., Takahashi, A., & Okada, T. (2007). Laser-imaging of laser-produced tin plume behavior for EUV light source. : Conference on Lasers and Electro-Optics/Pacific Rim, CLEOPR 2007 (Optics InfoBase Conference Papers). Optical Society of America.

Laser-imaging of laser-produced tin plume behavior for EUV light source. / Nakamura, Daisuke; Hashimoto, Yuki; Tamaru, Koji; Takahashi, Akihiko; Okada, Tatsuo.

Conference on Lasers and Electro-Optics/Pacific Rim, CLEOPR 2007. Optical Society of America, 2007. (Optics InfoBase Conference Papers).

研究成果: 著書/レポートタイプへの貢献会議での発言

Nakamura, D, Hashimoto, Y, Tamaru, K, Takahashi, A & Okada, T 2007, Laser-imaging of laser-produced tin plume behavior for EUV light source. : Conference on Lasers and Electro-Optics/Pacific Rim, CLEOPR 2007. Optics InfoBase Conference Papers, Optical Society of America, Conference on Lasers and Electro-Optics/Pacific Rim, CLEOPR 2007, Seoul, 大韓民国, 8/26/07.
Nakamura D, Hashimoto Y, Tamaru K, Takahashi A, Okada T. Laser-imaging of laser-produced tin plume behavior for EUV light source. : Conference on Lasers and Electro-Optics/Pacific Rim, CLEOPR 2007. Optical Society of America. 2007. (Optics InfoBase Conference Papers).
Nakamura, Daisuke ; Hashimoto, Yuki ; Tamaru, Koji ; Takahashi, Akihiko ; Okada, Tatsuo. / Laser-imaging of laser-produced tin plume behavior for EUV light source. Conference on Lasers and Electro-Optics/Pacific Rim, CLEOPR 2007. Optical Society of America, 2007. (Optics InfoBase Conference Papers).
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