Laser-induced damage of optical coatings grown with surface chemical reaction

Shin ichi Zaitsu; Shinji Motokoshi; Takahisa Jitsuno; Tatsuhiko Yamanaka

doi:10.1117/12.354234

Laser-induced damage of optical coatings grown with surface chemical reaction

Shin ichi Zaitsu, Shinji Motokoshi, Takahisa Jitsuno, Tatsuhiko Yamanaka

研究成果: ジャーナルへの寄稿 › 会議記事 › 査読

8 被引用数 (Scopus)

抄録

We prepared optical thin films grown with surface chemical reactions using TiCl₄ and H₂O for TiO₂, Al(CH₃)₃ and H₂O₂ for Al₂O₃ as reactants. The uniformity of thickness distribution was good over 240 mm in diameter. The film thickness could be precisely controlled only by the number of cycles. Two-layer TiO₂Al₂O₃ anti-reflection coating with less than 0.2% reflection loss at 532 nm was fabricated. Laser-induced damage thresholds strongly depended on the growth temperature and the introduced gas pressure. They increased with decreasing the growth temperature and with increasing the introduced gas pressure.

本文言語	英語
ページ（範囲）	204-211
ページ数	8
ジャーナル	Proceedings of SPIE - The International Society for Optical Engineering
巻	3492
号	I
DOI	https://doi.org/10.1117/12.354234
出版ステータス	出版済み - 1999
外部発表	はい
イベント	Proceedings of the 1998 3rd International Conference on Solid State Lasers for Application to Inertial Confinement Fusion - Monterey, CA, USA 継続期間: 6月 7 1998 → 6月 12 1998

!!!All Science Journal Classification (ASJC) codes

電子材料、光学材料、および磁性材料
凝縮系物理学
コンピュータサイエンスの応用
応用数学
電子工学および電気工学

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title = "Laser-induced damage of optical coatings grown with surface chemical reaction",

abstract = "We prepared optical thin films grown with surface chemical reactions using TiCl4 and H2O for TiO2, Al(CH3)3 and H2O2 for Al2O3 as reactants. The uniformity of thickness distribution was good over 240 mm in diameter. The film thickness could be precisely controlled only by the number of cycles. Two-layer TiO2Al2O3 anti-reflection coating with less than 0.2% reflection loss at 532 nm was fabricated. Laser-induced damage thresholds strongly depended on the growth temperature and the introduced gas pressure. They increased with decreasing the growth temperature and with increasing the introduced gas pressure.",

author = "Zaitsu, {Shin ichi} and Shinji Motokoshi and Takahisa Jitsuno and Tatsuhiko Yamanaka",

year = "1999",

doi = "10.1117/12.354234",

language = "English",

volume = "3492",

pages = "204--211",

journal = "Proceedings of SPIE - The International Society for Optical Engineering",

issn = "0277-786X",

publisher = "SPIE",

number = "I",

note = "Proceedings of the 1998 3rd International Conference on Solid State Lasers for Application to Inertial Confinement Fusion ; Conference date: 07-06-1998 Through 12-06-1998",

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TY - JOUR

T1 - Laser-induced damage of optical coatings grown with surface chemical reaction

AU - Zaitsu, Shin ichi

AU - Motokoshi, Shinji

AU - Jitsuno, Takahisa

AU - Yamanaka, Tatsuhiko

PY - 1999

Y1 - 1999

N2 - We prepared optical thin films grown with surface chemical reactions using TiCl4 and H2O for TiO2, Al(CH3)3 and H2O2 for Al2O3 as reactants. The uniformity of thickness distribution was good over 240 mm in diameter. The film thickness could be precisely controlled only by the number of cycles. Two-layer TiO2Al2O3 anti-reflection coating with less than 0.2% reflection loss at 532 nm was fabricated. Laser-induced damage thresholds strongly depended on the growth temperature and the introduced gas pressure. They increased with decreasing the growth temperature and with increasing the introduced gas pressure.

AB - We prepared optical thin films grown with surface chemical reactions using TiCl4 and H2O for TiO2, Al(CH3)3 and H2O2 for Al2O3 as reactants. The uniformity of thickness distribution was good over 240 mm in diameter. The film thickness could be precisely controlled only by the number of cycles. Two-layer TiO2Al2O3 anti-reflection coating with less than 0.2% reflection loss at 532 nm was fabricated. Laser-induced damage thresholds strongly depended on the growth temperature and the introduced gas pressure. They increased with decreasing the growth temperature and with increasing the introduced gas pressure.

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DO - 10.1117/12.354234

M3 - Conference article

AN - SCOPUS:0032632972

VL - 3492

SP - 204

EP - 211

JO - Proceedings of SPIE - The International Society for Optical Engineering

JF - Proceedings of SPIE - The International Society for Optical Engineering

SN - 0277-786X

IS - I

T2 - Proceedings of the 1998 3rd International Conference on Solid State Lasers for Application to Inertial Confinement Fusion

Y2 - 7 June 1998 through 12 June 1998

ER -

Laser-induced damage of optical coatings grown with surface chemical reaction

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!!!All Science Journal Classification (ASJC) codes

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