Laser induced fluorescence measurement of plasma plume during pulsed laser deposition of diamond-like carbon

Yukihiko Yamagata, Yuji Kozai, Fumiaki Mitsugi, Tomoaki Ikegami, Kenji Ebihara, Ajay Sharma, Robert M. Mayo, Jagdish Narayan

研究成果: Contribution to journalArticle査読

1 被引用数 (Scopus)

抄録

Dynamics of carbon ablation plasma plume during the preparation of diamond-like carbon films by KrF excimer pulsed laser deposition was investigated using laser induced fluorescence (LIF) and optical emission spectroscopy. LIF signal from C2 molecule (Swan band, d 3g - a 3u) was detected using a photomultiplier tube and an intensified CCD camera. Temporal evolution and spatial distribution of C2 molecules in the ablated plume were measured as a function of laser energy density and ablation area. LIF intensity is found to be weaker in the central part of the plume than that at the periphery at incident energy greater than 6 J/cm2. It is conjectured that some of C2 molecules are dissociated by collision with energetic species in central part of the ablation plume. Dynamics of ablation plasma plume is strongly dependent on the size of ablated area.

本文言語英語
ページ(範囲)J341-J346
ジャーナルMaterials Research Society Symposium - Proceedings
617
DOI
出版ステータス出版済み - 2000
外部発表はい

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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