Laser stimulated scattering microscope: A tool for investigating modified metallic surfaces

Akira Harata, Hiroyuki Nishimura, Takayuki Tanaka, Tsuguo Sawada

研究成果: Contribution to journalArticle査読

16 被引用数 (Scopus)

抄録

An instrument, based on the principle of microscopic measurements using transient reflecting gratings, has been built for investigation of modified metallic surfaces. After holographic illumination of focused light pulses of short duration, dynamic processes are observed by detecting the reflecting diffraction of the synchronously delayed probe pulse, while the sample is two-dimensionally scanned. Distribution imaging and relaxation time (or diffusivity) imaging are demonstrated for ion-implanted silicon wafers.

本文言語英語
ページ(範囲)618-622
ページ数5
ジャーナルReview of Scientific Instruments
64
3
DOI
出版ステータス出版済み - 12 1 1993
外部発表はい

All Science Journal Classification (ASJC) codes

  • 器械工学

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