Laser Thomson scattering measurements of negative ion density in a glow discharge plasma

M. Noguchi, K. Ariga, T. Hirao, P. Suanpoot, Y. Yamagata, K. Uchino, K. Muraoka

研究成果: ジャーナルへの寄稿学術誌査読

17 被引用数 (Scopus)

抄録

Laser Thomson scattering (LTS) is shown to provide a useful means for measurements of negative ion density in a glow discharge plasma. Because the saturation energy density is so low that complete photo-detachment occurs at a very early stage of the probing laser pulse for the LTS measurement, the main part of the laser pulse is Thomson scattered by the photo-detached electrons as well as those already generated in the discharge. The energies of photo-detached electrons are below the energy difference between the photon energy and the electron affinity of the negative ions, and Thomson scattering from these appears below the difference energy. The principle has been tested using the second harmonic of a YAG laser light (532 nm) against an inductively coupled plasma operated in a mixture of Ar(80%)/O2(20%) at a pressure of 20 mTorr, and yielded the negative ion density of 1.5 × 1017 m-3, which amounted to 37% of the electron density of 4.1 × 1017 m-3 or 27% of the negative charges (electrons and negative ions).

本文言語英語
ページ(範囲)57-59
ページ数3
ジャーナルPlasma Sources Science and Technology
11
1
DOI
出版ステータス出版済み - 2月 2002

!!!All Science Journal Classification (ASJC) codes

  • 凝縮系物理学

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