Laser Thomson scattering studies of glow discharge plasmas

K. Muraoka, K. Uchino, Y. Yamagata, Y. Noguchi, M. Mansour, P. Suanpoot, S. Narishige, M. Noguchi

研究成果: ジャーナルへの寄稿会議記事査読

20 被引用数 (Scopus)


This paper describes the developments of laser Thomson scattering (LTS) for measuring electron density and temperature, or more generally electron energy distribution function (eedf) in glow discharge plasmas with electron densities below 1018 m-3. A brief description of the method for overcoming the sparcity of scattered photons by data accumulation techniques is followed by examples of applications, conducted at the authors' laboratory, to the measurement of the shape of the eedf and temperature anisotropy in various discharges including reactive plasmas, and some as close as 100 μm from a material surface. Measurements of the latter sort should permit the elucidation of micro-discharges and electrode effects such as cathode fall phenomena in particular.

ジャーナルPlasma Sources Science and Technology
3 A
出版ステータス出版済み - 8月 2002
イベント25th International Conference on Phenomena in Ionizied Gases - Nagoya, 日本
継続期間: 7月 17 20017月 22 2001

!!!All Science Journal Classification (ASJC) codes

  • 凝縮系物理学


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