Linear thermopile array for fast searching

Nami Shibata, masaki Hirota, Fuminori Satou, Hidemi Yasui, Shinichi Morita

研究成果: ジャーナルへの寄稿記事

1 引用 (Scopus)

抄録

A linear thermopile array with characteristics of high responsivity, fast response and low cost has been developed for use in searching for and detecting heat-radiating objects. The thermopile is fabricated by means of a silicon surface micromachining, compatible Si CMOS process and a lift-off technique, which results in a precisely patterned Au black absorption layer. The dynamic signal-to-noise ratio is proposed as a new figure of merit for evaluating thermal infrared sensors and is used to design the thermopile configuration so as to obtain optimum responsivity and thermal time constant. The newly fabricated thermopile array is composed of a zigzag arrangement of two rows of seven infrared sensing elements and achieves responsivity of 230 V/W and a thermal time constant of 0.5 msec. The array, incorporating an optical system with a 30-mm-diameter lens and an focal ratio (F/#) of 0.74, provides a dynamic S/N ratio of 6.9 at a scanning speed of 1,000 m/s and a distance of 80 m for a target with a background temperature difference of 25 °C.

元の言語英語
ページ(範囲)546-555
ページ数10
ジャーナルProceedings of SPIE - The International Society for Optical Engineering
3698
出版物ステータス出版済み - 1999
外部発表Yes

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Thermopiles
thermopiles
Responsivity
Linear Array
Time Constant
time constant
Thermal Infrared
Infrared Sensor
Micromachining
Zigzag
Infrared radiation
Surface micromachining
Optical System
Lens
Scanning
Arrangement
Figure
Silicon
Sensing
Infrared

All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering
  • Condensed Matter Physics

これを引用

Linear thermopile array for fast searching. / Shibata, Nami; Hirota, masaki; Satou, Fuminori; Yasui, Hidemi; Morita, Shinichi.

:: Proceedings of SPIE - The International Society for Optical Engineering, 巻 3698, 1999, p. 546-555.

研究成果: ジャーナルへの寄稿記事

Shibata, Nami ; Hirota, masaki ; Satou, Fuminori ; Yasui, Hidemi ; Morita, Shinichi. / Linear thermopile array for fast searching. :: Proceedings of SPIE - The International Society for Optical Engineering. 1999 ; 巻 3698. pp. 546-555.
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