Localized synthesis of single-walled carbon nanotubes on silicon substrates by a laser heating catalytic CVD

Synthesis of high-purity single-walled carbon nanotubes (SWNTs) is demonstrated by a laser heating catalytic CVD method. This method makes it possible to produce SWNTs without the use of an electric furnace or hot filament. SWNTs were synthesized from alcohol using Fe/Co catalyst particles supported on zeolite and Mo/Co particles deposited directly on a substrate. Synthesis of high purity SWNTs was confirmed by in situ Raman scattering analysis and AFM and FE-SEM observations.