Low-Power and ppm-Level Detection of Gas Molecules by Integrated Metal Nanosheets

T. Tanaka, K. Tabuchi, K. Tatehora, Y. Shiiki, S. Nakagawa, T. Takahashi, R. Shimizu, H. Ishikuro, T. Kuroda, T. Yanagida, K. Uchida

研究成果: 書籍/レポート タイプへの寄稿会議への寄与

5 被引用数 (Scopus)

抄録

Ppm-level hydrogen and ammonia in air were recognized by low-power, integrated sensors consisting of catalytic metal nanosheets. Thermal energy necessary for catalytic reactions were given by Joule heating not by external heaters. The ther-mal-aware design of sensors reduces the power consumption to 0.14 mW. The low-power and small-area properties enable large-scale, on-chip integration of molecular sensors, which will be useful in IoT era. A sensor array was successfully connected to a platform with wireless connectivity.

本文言語英語
ホスト出版物のタイトル2019 Symposium on VLSI Technology, VLSI Technology 2019 - Digest of Technical Papers
出版社Institute of Electrical and Electronics Engineers Inc.
ページT158-T159
ISBN(電子版)9784863487178
DOI
出版ステータス出版済み - 6月 2019
イベント39th Symposium on VLSI Technology, VLSI Technology 2019 - Kyoto, 日本
継続期間: 6月 9 20196月 14 2019

出版物シリーズ

名前Digest of Technical Papers - Symposium on VLSI Technology
2019-June
ISSN(印刷版)0743-1562

会議

会議39th Symposium on VLSI Technology, VLSI Technology 2019
国/地域日本
CityKyoto
Period6/9/196/14/19

!!!All Science Journal Classification (ASJC) codes

  • 電子工学および電気工学

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