Low-Power and ppm-Level Multimolecule Detection by Integration of Self-Heated Metal Nanosheet Sensors

Takahisa Tanaka, Takeshi Yanagida, Ken Uchida, Kenta Tabuchi, Kohei Tatehora, Yohsuke Shiiki, Shuya Nakagawa, Tsunaki Takahashi, Ryota Shimizu, Hiroki Ishikuro, Tadahiro Kuroda

研究成果: Contribution to journalArticle査読

4 被引用数 (Scopus)

抄録

H2 and NH3 detection with low power consumption was demonstrated by integrated chemiresistive Pt and PtRh nanosheet sensors on glass substrates. The self-heating effects realized low power and local heating of metal nanosheet sensors, enabling the integration of sensors with different operating temperatures. Based on different resistance changes in Pt and PtRh nanosheets toward H2 and NH3, the concentration of each gas was detected from a gas mixture by consuming around 1-mW power. For decreasing the power consumption and further integration of sensors, sensor scaling and pulsed operations were numerically and experimentally studied. In addition to good connectivity of metal nanosheet sensors to large-scale integration (LSI) circuits, improvements of the power consumption by sensor scaling were proven. The pulsed operations required for integrated sensor arrays maintained a sensor response, or a resistance change, of approximately 60%, even when the power consumption was reduced by 20%.

本文言語英語
論文番号8887245
ページ(範囲)5393-5398
ページ数6
ジャーナルIEEE Transactions on Electron Devices
66
12
DOI
出版ステータス出版済み - 12 2019

All Science Journal Classification (ASJC) codes

  • 電子材料、光学材料、および磁性材料
  • 電子工学および電気工学

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